scholarly journals Charged particle detectors based on high quality amorphous silicon deposited with hydrogen or helium dilution of silane

2002 ◽  
Author(s):  
W.S. Hong ◽  
A. Mireshghi ◽  
J.S. Drewery ◽  
T. Jing ◽  
Y. Kitsuno ◽  
...  
Keyword(s):  
Charged Particle ◽  
Amorphous Silicon ◽  
High Quality ◽  
Particle Detectors ◽  
Helium Dilution

scholarly journals Charged particle detectors based on high quality amorphous silicon deposited with hydrogen or helium dilution of silane

1995 ◽  
Vol 42 (4) ◽  
pp. 240-246 ◽  
Author(s):  
W.S. Hong ◽  
A. Mireshghi ◽  
J.S. Drewery ◽  
T. Jing ◽  
Y. Kitsuno ◽  
...  
Keyword(s):  
Charged Particle ◽  
Amorphous Silicon ◽  
High Quality ◽  
Particle Detectors ◽  
Helium Dilution

High Rate Deposition of Stable Hydrogenated Amorphous Silicon in Transition from Amorphous to Microcrystalline Silicon

2003 ◽  
Vol 762 ◽  
Author(s):  
Guofu Hou ◽  
Xinhua Geng ◽  
Xiaodan Zhang ◽  
Ying Zhao ◽  
Junming Xue ◽  
...  
Keyword(s):  
Phase Transition ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
High Rate ◽  
Very High Frequency ◽  
High Quality ◽  
Working Pressure ◽  
Hydrogen Dilution ◽  
Hydrogenated Amorphous

AbstractHigh rate deposition of high quality and stable hydrogenated amorphous silicon (a-Si:H) films were performed near the threshold of amorphous to microcrystalline phase transition using a very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The effect of hydrogen dilution on optic-electronic and structural properties of these films was investigated by Fourier-transform infrared (FTIR) spectroscopy, Raman scattering and constant photocurrent method (CPM). Experiment showed that although the phase transition was much influenced by hydrogen dilution, it also strongly depended on substrate temperature, working pressure and plasma power. With optimized condition high quality and high stable a-Si:H films, which exhibit σph/σd of 4.4×106 and deposition rate of 28.8Å/s, have been obtained.

On the laser calibration of charged particle detectors

2000 ◽  
Vol 43 (4) ◽  
pp. 470-480
Author(s):  
E. M. Gushchin ◽  
S. V. Somov
Keyword(s):  
Charged Particle ◽  
Particle Detectors ◽  
Laser Calibration

scholarly journals High quality crystalline silicon surface passivation by combined intrinsic and n-type hydrogenated amorphous silicon

2011 ◽  
Vol 99 (20) ◽  
pp. 203503 ◽  
Author(s):  
Jan-Willem A. Schüttauf ◽  
Karine H. M. van der Werf ◽  
Inge M. Kielen ◽  
Wilfried G. J. H. M. van Sark ◽  
Jatindra K. Rath ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
High Quality ◽  
Hydrogenated Amorphous ◽  
Silicon Surface Passivation

Deposition of high quality amorphous silicon films with strong hydrogen diluted silane as reactant gas source

1993 ◽  
Vol 2 (11) ◽  
pp. 807-815 ◽  
Author(s):  
He Yu-liang ◽  
Liu Xiang-na ◽  
Yin Cheng-zhong ◽  
Zhang Yu
Keyword(s):  
Amorphous Silicon ◽  
Silicon Films ◽  
High Quality ◽  
Gas Source
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