Electrical Properties of HfTiON Gate-Dielectric GaAs Metal-Oxide-Semiconductor Capacitor With AlON as Interlayer
2014 ◽
Vol 61
(3)
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pp. 742-746
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2017 ◽
Vol 11
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pp. 1700180
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2019 ◽
Vol 34
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pp. 035027
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Keyword(s):
2017 ◽
Vol 17
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pp. 458-462
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