A Rapid Vibration Reduction Method for Macro–Micro Composite Precision Positioning Stage

As the thermal deformation significantly impacts the accuracy of precision positioning stage, it is necessary to realize the thermal error. The thermal deformation of the positioning stage is simulated by the finite element analysis. The relationship between the temperature variation and thermal error is fitted third-order polynomial function whose parameters are determined by genetic algorithm neural network (GANN). The operators of the GANN are optimized through a parametric study. The results show that the model can describe the relationship between the temperature and thermal deformation well.

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Design of a 6-DOF precision positioning stage: Kinematic analysis and dynamic modeling

2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) ◽

10.1109/3m-nano.2015.7425478 ◽

2015 ◽

Author(s):

Kunhai Cai ◽

Yanling Tian ◽

Zhen Yang ◽

Jiangkun Shang

Keyword(s):

Dynamic Modeling ◽

Kinematic Analysis ◽

Precision Positioning ◽

Positioning Stage

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Compounding Control of Ultra-precision Positioning Stage Based on Inverse Generalized PI Model

Journal of Mechanical Engineering ◽

10.3901/jme.2015.02.198 ◽

2015 ◽

Vol 51 (2) ◽

pp. 198 ◽

Cited By ~ 1

Author(s):

Yanbing TIAN

Keyword(s):

Precision Positioning ◽

Positioning Stage ◽

Ultra Precision

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A Novel Trans-Scale Precision Positioning Stage Based on the Stick-Slip Effect

International Journal of Intelligent Mechatronics and Robotics ◽

10.4018/ijimr.2012040101 ◽

2012 ◽

Vol 2 (2) ◽

pp. 1-14 ◽

Cited By ~ 2

Author(s):

Bowen Zhong ◽

Liguo Chen ◽

Zhenhua Wang ◽

Lining Sun

Keyword(s):

Friction Model ◽

Slip Effect ◽

Precision Positioning ◽

Stick Slip ◽

Kinematics Model ◽

Lugre Friction Model ◽

Positioning Stage ◽

Simulation Results ◽

Relationship Of ◽

The Relationship

This article focuses on developing a novel trans-scale precision positioning stage based on the stick-slip effect. The stick-slip effect is introduced and the rigid kinematics model of the stick-slip driving is established. The forward and return displacement equations of each step of the stick-slip driving are deduced. The relationship of return displacement and the acceleration produced by friction are obtained according to displacement equations. Combining with LuGre friction model, the flexible dynamics model of the stick-slip driving is established and simulated by using Simulink software. Simulation results show that the backward displacement will reduce with the acceleration of the slider produced by dynamic friction force, the rigid kinematics model is also verified by simulation results which are explained in further detail in the article.

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