The use of Statistical Process Control (SPC) in the manufacturing process has been historically proven to increase the quality of the product. Recent trends show that companies are becoming increasingly reliant on computer based-SPC because it can save a significant amount of time compared with traditional SPC. In addition, labor-intensive tasks, such as manual data collection and entry, can be eliminated, thus reducing human error. This paper aims to prove the benefits of computer based system for SPC known as e-SPC in a semiconductor manufacturing environment. Specifically, this paper will present the case study‟s finding that show how one semiconductor manufacturing company‟s use of e-SPC can detect a process abnormality at an early stage and in real time compared with manual SPC. The case study involves interviews with the company representatives and observations on the manufacturing environment. This paper will also show how e-SPC can be used to control and then to stabilize the manufacturing operation. In conclusion, this paper demonstrates that e-SPC can significantly improve the performance of a manufacturing environment. Moreover, this paper can also be used as a reference for the implementation of e-SPC in any company.
In-situ process control for semiconductor manufacturing