Low Temperature Growth of Piezoelectric AlN Film for Surface and Bulk Wave Transducers by RF Reactive Planar Magnetron Sputtering
Keyword(s):
Aln Film
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1981 ◽
Vol 20
(S3)
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pp. 149
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2004 ◽
Vol 11
(06)
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pp. 515-519
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Keyword(s):
1996 ◽
Vol 14
(4)
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pp. 2238-2242
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2010 ◽
Vol 94
(9)
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pp. 1501-1505
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2001 ◽
Vol 135
(2-3)
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pp. 286-290
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Keyword(s):
2014 ◽
Vol 32
(3)
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pp. 031514
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