Direct Channel Length Determination Of Sub-100nm Mos Devices Using Scanning Capacitance Microscopy
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2006 ◽
Vol 50
(11-12)
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pp. 1774-1779
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1981 ◽
Vol 115
(1)
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pp. 138-146
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2006 ◽
Vol 25
(10)
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pp. 2228-2231
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1964 ◽
Vol 47
(8)
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pp. 920-921
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1986 ◽
Vol 22
(2)
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pp. 254
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