Effect of Pressure on Plasma-Assisted Chemical Vapor. Deposition of Silicon Oxide(s)
1994 ◽
Vol 77
(5)
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pp. 1366-1368
Keyword(s):
2002 ◽
Vol 20
(3)
◽
pp. 828
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Keyword(s):
2009 ◽
Vol 5
(2)
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pp. 279-285
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1998 ◽
Vol 16
(2)
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pp. 483
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2011 ◽
Vol 257
(23)
◽
pp. 9717-9723
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2012 ◽
Vol 8
(3)
◽
pp. 245-250
◽
2003 ◽
Vol 444
(1-2)
◽
pp. 125-131
◽
Keyword(s):
Keyword(s):