Plasma-assisted chemical vapor deposition and characterization of high quality silicon oxide films
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2002 ◽
Vol 20
(3)
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pp. 828
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1997 ◽
Vol 90
(1-2)
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pp. 102-106
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2003 ◽
Vol 444
(1-2)
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pp. 125-131
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2000 ◽
Vol 39
(Part 1, No. 1)
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pp. 330-336
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1985 ◽
Vol 132
(2)
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pp. 482-488
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1999 ◽
Vol 16
(10)
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pp. 750-752
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2006 ◽
Vol 24
(2)
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pp. 291-295
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1985 ◽
Vol 3
(6)
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pp. 1604
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