Visualization of Two-Dimensional Excitation Temperatures in CH4/N2/Ar Plasmas for Preparation of Carbonaceous Materials
Keyword(s):
Analysis of the two-dimensional (2D) distribution of excited Ar atoms has been made to synthesize better anode materials for lithium-ion batteries. The 2D visualization of excitation temperatures was based on the “two-line” method, which are important to diagnose the plasmas used for the preparation of carbonaceous materials by plasma enhanced chemical vapor deposition. The results showed that the excitation temperature in N2-rich (CH4-lean) plasma was lower than that in N2-lean (CH4-rich), and is attributed to different excitation and reaction mechanisms of CH4 and N2.
2015 ◽
Vol 282
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pp. 257-264
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2015 ◽
Vol 154
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pp. 136-141
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2003 ◽
Vol 125
(7-8)
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pp. 387-390
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2018 ◽
Vol 747
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pp. 796-802
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2013 ◽
Vol 106
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pp. 235-243
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2017 ◽
Vol 28
(9)
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pp. 2366-2372
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