scholarly journals Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates

Micromachines ◽  
2018 ◽  
Vol 9 (11) ◽  
pp. 604 ◽  
Author(s):  
Yiyuan Li ◽  
Jianhua Li ◽  
Lixin Xu
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Basic Component ◽  
Silicon Substrates ◽  
Element Analysis ◽  
Microelectromechanical System ◽  
Single Turn ◽  
Inductor Coil ◽  
Calculation Results ◽  
Rf Performance

Microelectromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance. The inductance value is one of the main features that characterizes the performance of inductors. It is important to consider the influence of the substrate and the suspension height in calculating the inductance value accurately. In this paper, a method is proposed to calculate the inductance value of the MEMS suspended inductor wire with a silicon substrate, as the wire is the basic component of the inductor coil. Then the method is extended to the suspended inductors consisting of a single turn coil. The calculation results obtained by this proposed method were verified by finite-element analysis (HFSS) and they were found to agree well with the results of the HFSS simulation.

Finite Element Analysis of Tianerya Trench-Buried Inverted Siphon

2013 ◽  
Vol 804 ◽  
pp. 320-324
Author(s):  
Xiang Zan Xie
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Finite Element Calculation ◽  
Construction Process ◽  
Element Calculation ◽  
Element Analysis ◽  
Operational Process ◽  
Inverted Siphon ◽  
Calculation Results ◽  
Calculation Software

This paper adopts universal finite element calculation software to carry out finite element analysis for Tianerya trench-buried inverted siphon. Researching variation law of the inverted siphons stress and displacement in construction process and operational process. The calculation results further shown design schemes rationality and safety. The analysis results provide a certain reference for design of trench-buried inverted siphon structure.

Modeling and Alleviating Instability in a MEMS Vertical Comb Drive Using a Progressive Linkage

2005 ◽  
Author(s):  
Jessica R. Bronson ◽  
Gloria J. Wiens ◽  
James J. Allen
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Parallel Plate ◽  
Fill Factor ◽  
Electrostatic Model ◽  
Comb Drive ◽  
Element Analysis ◽  
Microelectromechanical System ◽  
Comb Drives ◽  
High Fill Factor

Micro mirrors have emerged as key components for optical microelectromechanical system (MEMS) applications. Electrostatic vertical comb drives are attractive because they can be fabricated underneath the mirror, allowing for arrays with a high fill factor. Also, vertical comb drives are more easily controlled than parallel plate actuators, making them the better choice for analog scanning devices. The device presented in this paper is a one-degree of freedom vertical comb drive fabricated using Sandia National Laboratories SUMMiT™ five-level surface micromachining process. The electrostatic performance of the device is investigated using finite element analysis to determine the capacitance for a unit cell of the comb drive as the position of the device is varied. This information is then used to design a progressive linkage that will seek to alleviate or eliminate the effects of instability. The goal of this research is to develop an electrostatic model for the behavior of the vertical comb drive mirror and then use this to design a progressive-linkage that can delay or eliminate the pull-in instability.

The Finite Element Analysis and Optimization of Subway Steel Structure Work Platform Based on Workbench and Pro/E in a Subway

2012 ◽  
Vol 538-541 ◽  
pp. 2953-2956
Author(s):  
Ya Li ◽  
Guang Sheng Ren
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Structural Characteristics ◽  
Steel Structure ◽  
Strength Analysis ◽  
Element Analysis ◽  
Maximum Deformation ◽  
Software Model ◽  
The Finite Element Analysis ◽  
Calculation Results

The static and stability analysis of steel structure were taken according to steel structure work platform’s requirements and structural characteristics in a subway parking space by using the software model which is established by Pro/E software and implanted into the finite element analysis software ANSYS Workbench. The maximum deformation and stress in design load of the steel structure were calculated and the linear stress strength analysis of the key parts was carried out, also both the analysis and testing of the supporting pillar’s stability were performed. The results show that the structure model established by Pro/E and the calculation method are reasonable. Moreover, the calculation results are of high accuracy. The profile size is properly chosen and the structure bearing capacity and deformation meet the design requirements.

Optimal Design of a Double-Sided Slotted Iron Core Type PMLSM with Manufacturing Considerations

2010 ◽  
Vol 670 ◽  
pp. 235-242 ◽  
Author(s):  
Y.W. Zhu ◽  
D.S. Kim ◽  
D.H. Kooa ◽  
Y.H. Cho
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Response Surface Methodology ◽  
Numerical Calculation ◽  
Optimal Design ◽  
Iron Core ◽  
Two Dimensional ◽  
Element Analysis ◽  
Detent Force ◽  
Calculation Results

This paper investigates an optimal design of a double-sided slotted iron core type permanent magnet linear synchronous motor (PMLSM) using for ropeless elevator system. To obtain the optimal structure, the combination of response surface methodology (RSM) and two dimensional (2D) finite element analysis (FEA), which can solve the problem effectively without much time consuming, is utilized to investigate the PMLSM characteristics. Moreover, the detent force is more detailed analyzed with the manufacturing consideration. In final some numerical calculation results are reported to validate the applicability of this double-sided slotted iron core type PMLSM in ropeless elevator system. Introduction

Finite Element Analysis on Frame Structure of Light Steel Temporary Buildings

2013 ◽  
Vol 351-352 ◽  
pp. 808-811
Author(s):  
Zheng Zhang ◽  
Xue Feng Cai ◽  
Yong Chao Ma ◽  
Ji Zhong Zhou
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Simple Structure ◽  
Theoretical Study ◽  
Frame Structure ◽  
Structure Model ◽  
Construction Site ◽  
Element Analysis ◽  
Calculation Results ◽  
Design Loads

Light steel temporary building is commonly used in the construction site, with advantages on simple structure, repeat used and small deadweight. For light steel temporary structure building there are still not enough researches on the mechanical properties and mechanism of action, and there are still not enough relevant standards and requirements to conduct the design and construction of the buildings. In order to precede to theoretical study on frame structure of light steel temporary buildings a method by Finite Element Analysis was proposed. This method is based on FEA software, Ansys. Using this method a monolayer frame structure and a two-story frame structure and a trilaminar frame structure model were analyzed. The calculation results of horizontal displacements under design loads by FEA were obtained and discussed.

Research on Finite Element Analysis of Nanping Inverted Siphon Engineering

2013 ◽  
Vol 394 ◽  
pp. 353-356
Author(s):  
Dongy Yu Ji
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Finite Element Calculation ◽  
Construction Process ◽  
Element Calculation ◽  
Force Analysis ◽  
Element Analysis ◽  
Inverted Siphon ◽  
Calculation Results ◽  
Calculation Software

This paper adopts universal finite element calculation software to carry out force analysis for Nanping trench-buried inverted siphon,computer is applied in analysis of trench-buried inverted siphon. Deducing variation law of the inverted siphons stress and displacement in construction process and operational process. The calculation results further shown design schemes rationality and safety. which provide reliable reference of design and construction for the trench-buried inverted siphon.

Finite Element Analysis for Cycloid Gear and pin Teeth of FA Cycloid Drive Based on ANSYS

2012 ◽  
Vol 215-216 ◽  
pp. 1197-1200 ◽  
Author(s):  
Lei Lei ◽  
Xiao Chun Shi ◽  
Tian Min Guan
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Three Dimensional ◽  
Analysis Method ◽  
Force Analysis ◽  
Element Analysis ◽  
Fem Model ◽  
Contact State ◽  
Analysis Theory ◽  
Calculation Results

In order to validate the force analysis between cycloid gear and pin wheel, the paper built the contact FEM model of between cycloid gear and pin teeth, analyzed statically three-dimensional contact analysis for them and get their contact state. The calculation results coincided with the force analysis method and proved the correctness of the stress analysis theory.

Finite Element Analysis for Pin-Hole-Output Mechanism of FA Cycloid Drive Based on ANSYS

2011 ◽  
Vol 308-310 ◽  
pp. 2220-2223 ◽  
Author(s):  
Lei Lei ◽  
Ying Tao ◽  
Tian Min Guan
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Stress Analysis ◽  
Three Dimensional ◽  
Element Model ◽  
Analysis Method ◽  
Element Analysis ◽  
Analysis Theory ◽  
Calculation Results ◽  
Dynamic Stress Analysis

In order to validate the pin-hole-output mechanism of FA cycloid drive force analysis theory, and based on the study on the basis of the contact problem, this article used the international advanced finite element analysis software ANSYS, established the output dowel pin and cycloid gear pin hole's contacting finite element model, and analyzed the static three-dimensional contact analysis. The calculation results coincided with the proposed pin-hole-output mechanism with gap dynamic stress analysis method, proved the correctness of the stress analysis theory.

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