Design of a Compliant XY Positioning Stage With Large Workspace

2015 ◽  
Author(s):  
Chao-Min Huang ◽  
Hai-Jun Su
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Degrees Of Freedom ◽  
Ball Bearings ◽  
Kinematic Constraint ◽  
Element Analysis ◽  
Positioning Stage ◽  
Motion Range ◽  
Moving Direction ◽  
Operation Parameters

Flexure mechanisms become more and more popular because of their better performance, easy maintenance, wear-free properties and predictability of kinematic variables changes. Comparing to traditional ball bearings or linear slides, however, range of motion limits flexure mechanisms applications in existing market. This paper presents the design of a novel planar XY stage synthesizing the benefits of parallel and serial kinematic constraint. By parallel connecting two mechanisms: the vertical and horizontal subsystems, which both have degrees of freedom (DOFs) in primary moving direction but different degrees of constraints (DOCs) in rotation, this system is able to reduce three parasitic rotation angles (pitch, roll and yaw) less than one micro radium and also have motion range up to 40mm × 40mm. Analytical model and finite element analysis (FEA) are present to validate the performance of this stage and also determine appropriate operation parameters.

Adaptive Degrees-of-Freedom Finite Element Analysis of 3-D Transient Magnetic Problems

2020 ◽  
pp. 1-1
Author(s):  
Yunpeng Zhang ◽  
Xinsheng Yang ◽  
Huihuan Wu ◽  
Dingguo Shao ◽  
Weinong Fu
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Degrees Of Freedom ◽  
Element Analysis

scholarly journals Eliminating Underconstraint in Double Parallelogram Flexure Mechanisms

2015 ◽  
Vol 137 (9) ◽  
Author(s):  
Robert M. Panas ◽  
Jonathan B. Hopkins
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Experimental Measurement ◽  
Degrees Of Freedom ◽  
Dynamic Performance ◽  
Average Error ◽  
Static Stiffness ◽  
Element Analysis ◽  
Linkage Design ◽  
Analytical Expressions

We present an improved flexure linkage design for removing underconstraint in a double parallelogram (DP) linear flexural mechanism. This new linkage alleviates many of the problems associated with current linkage design solutions such as static and dynamic performance losses and increased footprint. The improvements of the new linkage design will enable wider adoption of underconstraint eliminating (UE) linkages, especially in the design of linear flexural bearings. Comparisons are provided between the new linkage design and existing UE designs over a range of features including footprint, dynamics, and kinematics. A nested linkage design is shown through finite element analysis (FEA) and experimental measurement to work as predicted in selectively eliminating the underconstrained degrees-of-freedom (DOF) in DP linear flexure bearings. The improved bearing shows an 11 × gain in the resonance frequency and 134× gain in static stiffness of the underconstrained DOF, as designed. Analytical expressions are presented for designers to calculate the linear performance of the nested UE linkage (average error < 5%). The concept presented in this paper is extended to an analogous double-nested rotary flexure design.

A 2-legged XY parallel flexure motion stage with minimised parasitic rotation

2014 ◽  
Vol 228 (17) ◽  
pp. 3156-3169 ◽  
Author(s):  
Guangbo Hao
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Parallel Manipulator ◽  
Parallel Manipulators ◽  
Design Approach ◽  
Analytical Models ◽  
Geometrical Parameters ◽  
Element Analysis ◽  
Motion Range ◽  
Cross Axis

XY compliant parallel manipulators (aka XY parallel flexure motion stages) have been used as diverse applications such as atomic force microscope scanners due to their proved advantages such as eliminated backlash, reduced friction, reduced number of parts and monolithic configuration. This paper presents an innovative stiffness centre based approach to design a decoupled 2-legged XY compliant parallel manipulator in order to better minimise the inherent parasitic rotation and have a more compact configuration. This innovative design approach makes all of the stiffness centres, associated with the passive prismatic (P) modules, overlap at a point that all of the applied input forces can go through. A monolithic compact and decoupled XY compliant parallel manipulator with minimised parasitic rotation is then proposed using the proposed design approach based on a 2-PP kinematically decoupled translational parallel manipulator. Its load–displacement and motion range equations are derived, and geometrical parameters are determined for a specified motion range. Finite element analysis comparisons are also implemented to verify the analytical models with analysis of the performance characteristics including primary stiffness, cross-axis coupling, parasitic rotation, input and output motion difference and actuator nonisolation effect. Compared with the existing XY compliant parallel manipulators obtained using 4-legged mirror-symmetric constraint arrangement, the proposed XY compliant parallel manipulators based on stiffness centre approach mainly benefits from fewer legs resulting in reduced size, simpler modelling as well as smaller lost motion. Compared with existing 2-legged designs with the conventional arrangement, the present design has smaller parasitic rotation, which has been proved from the finite element analysis results.

Finite Element Analysis of 2-DOF Positioning Stage with a Gas Bearing Based on ANSYS

2014 ◽  
Vol 1056 ◽  
pp. 149-153
Author(s):  
Xiao Long Zhang ◽  
Zhi Wei Lu ◽  
Bo Liu ◽  
Jun An Zhang
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Analysis Software ◽  
Element Analysis ◽  
Maximum Deformation ◽  
Work Surface ◽  
The Finite Element Analysis ◽  
Positioning Stage ◽  
Decoupling Mechanism ◽  
Gas Bearing

In order to reach the requirements of the newest generation of wire bonder, gas bearing positioning stage directly driven by voice coil actuators is designed.In the stage,an air decoupling mechanism is used. And the finite element analysis software ANSYS was used to analyze the static and dynamic characterizes of the stage so that the structure meets the requirement of stiffness,and at the same time,the moving parts are as light as possible. The simulated results show that the maximum deformation of work platform is in the work surface and the deformation is in request scope.,the deformation of decoupling mechanism is in the main driving rod contact, but this has a little influence on the stage.

Workspace Comparison Between 3-PRR and 3-RPR Micro-Manipulator

2012 ◽  
Author(s):  
Yi Dong ◽  
Feng Gao ◽  
Yi Yue ◽  
Jin Feng
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Degrees Of Freedom ◽  
The Other ◽  
Element Analysis ◽  
The Finite Element Analysis ◽  
Structural Differences ◽  
Micro Manipulator

This paper presents two compliant micro-manipulators with different structures. One uses 3-PRR mechanism while the other one adopts 3-RPR mechanism. Both of the two micro-manipulators have two translational degrees of freedom (DOF) and one rotational DOF. But the properties, such as workspace, of the two micro-manipulators are not the same. In this paper, the workspaces are studied and compared. First, the structural differences are presented. Then, the stiffness derivations of the two micro-manipulators are given and the workspaces are calculated considering the properties of piezoelectric (PZT) actuators. Finally the finite element analysis and prototype experiments are performed to validate the obtained results.

Simplified Seismic Response Analysis Method Using Reduced Model of Piping System

2018 ◽  
Author(s):  
Michiya Sakai ◽  
Ryuya Shimazu ◽  
Shinichi Matsuura ◽  
Ichiro Tamura
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Seismic Response ◽  
Degrees Of Freedom ◽  
Response Analysis ◽  
Piping System ◽  
Element Analysis ◽  
Mass System ◽  
Piping Systems ◽  
Low Degrees

In the seismic response analysis of piping systems, finite element analysis is performed with analysis method guidelines [1]–[4] established based on benchmark analysis. However, since it takes a great deal of effort to carry out finite element analysis, a simplified method to analyze the seismic response of complex piping systems is required. In this research, we propose a method to reduce an equivalent spring-mass system model with low degrees of freedom, which can take into account the main mode of the complicated piping system. Simplified seismic evaluation is carried out using this spring mass system model with low degrees of freedom, and the accuracy of response evaluation is confirmed by comparison with finite element analysis.

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