Thermal Modeling of the Cavity in Pulsed Excimer Laser Calorimeters

2000 ◽  
Author(s):  
D. H. Chen ◽  
Z. M. Zhang

Abstract A simplified finite element model is built to study the thermal response of the 193-nm pulsed-laser calorimeter. The nonequivalence between pulsed-laser heating and electrical heating is estimated to be 0.46% at the thermocouple locations by comparing the calibration factors for average-power laser heating and electrical heating. This study should help the development of calibration and measurement standards in pulsed energy measurements for deep ultraviolet excimer lasers that are important for photolithographic and materials processing applications.

2012 ◽  
Vol 538-541 ◽  
pp. 1892-1896
Author(s):  
Chang Liang Lu ◽  
Fang You Hu ◽  
Xu Ren Huang ◽  
De Xian Yi ◽  
Ai Yong Cui ◽  
...  

The paper presents a study on analysis of thermal elasto-plastic stress during pulsed laser heating a K418 alloy plate. Based on elasto-plastic constitutive relationship, a spatial finite element model was established to simulate the whole process. The distribution and evolutions of temperature and stress field was calculated. The stresses induced during the process are highly heterogeneous because of the recurrent changing temperature field. The stresses during the process fluctuate as the temperature field changes. High level tensile residual stresses reside in the fusion zone after the laser process. Compared to all other stress components, longitudinal stress is the highest and will have considerable influences over the distortion level and failure of the material.


Carbon ◽  
1999 ◽  
Vol 37 (2) ◽  
pp. 231-239 ◽  
Author(s):  
Randy L Vander Wal ◽  
Mun Y Choi

2009 ◽  
Vol 108 (2) ◽  
pp. 125-130 ◽  
Author(s):  
V. V. Girzhon ◽  
A. V. Smolyakov ◽  
N. G. Babich ◽  
M. P. Semen’ko

1981 ◽  
Vol 128 (8) ◽  
pp. 1798-1803 ◽  
Author(s):  
D. J. Godfrey ◽  
A. C. Hill ◽  
C. Hill

2018 ◽  
Vol 440 ◽  
pp. 73-83 ◽  
Author(s):  
Young Woo Seo ◽  
Andreas Rosenkranz ◽  
Frank E. Talke

2019 ◽  
Vol 44 (12) ◽  
pp. 1608-1612
Author(s):  
Tugba Isik ◽  
Xiaohui Xu ◽  
Steven F. Son ◽  
I. Emre Gunduz ◽  
Volkan Ortalan

2018 ◽  
Vol 97 (4) ◽  
Author(s):  
L. Couëdel ◽  
V. Nosenko ◽  
M. Rubin-Zuzic ◽  
S. Zhdanov ◽  
Y. Elskens ◽  
...  

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