The Mechanical Behavior of a Micromachined PZT Membrane

2003 ◽  
Author(s):  
I. Demir ◽  
R. F. Richards ◽  
D. F. Bahr ◽  
C. D. Richards
Keyword(s):  
Thin Film ◽  
Mechanical Behavior ◽  
Material Properties ◽  
Energy Minimization ◽  
Variational Approach ◽  
Piezoelectric Ceramic ◽  
Electrical Power ◽  
Heat Engine ◽  
Silicon Membrane ◽  
Micro Heat Engine

The mechanical behavior of a micromachined PZT membrane for power applications is investigated. The membrane is a bulk-micromachined silicon membrane that supports a thin film of piezoelectric ceramic (PZT) sandwiched between platinum and gold electrodes. The membrane undergoes large periodic deflections to convert mechanical power to electrical power in a micro heat engine. An analysis using a variational approach is developed to find an approximate closed from solution based on energy minimization. Experiments were conducted to obtain material properties, residual stresses, and pressure deflection relationships. The modeled results compare well to the experimental results.

Low Frequency Operation of the P3 Micro Heat Engine

2002 ◽  
Author(s):  
Scott A. Whalen ◽  
Michael R. Thompson ◽  
Cecilia D. Richards ◽  
David F. Bahr ◽  
Robert F. Richards
Keyword(s):  
Combustion Engine ◽  
Thermal Power ◽  
Electrical Power ◽  
Heat Engine ◽  
Low Frequency ◽  
Thermodynamic Cycle ◽  
Mechanical Power ◽  
Peak Voltage ◽  
Macro Scale ◽  
Micro Heat Engine

The development and low frequency testing of a micro heat engine is presented. Production of electrical power by a dynamic micro heat engine is demonstrated. The prototype micro heat engine is an external combustion engine in which thermal power is converted to mechanical power through a novel thermodynamic cycle. Mechanical power is converted into electrical power through the use of a thin-film piezoelectric membrane generator. This design is well suited to photolithography-based batch fabrication methods and is unlike any conventionally manufactured macro-scale engine. A peak-to-peak voltage of .84 volts, and power output of 1.5 microwatts have been realized at operating speeds of 10 Hz. Measurements are also presented for the engine operating at resonant conditions. Cycle speeds up to 240 Hz have been obtained, with peak-to-peak voltages of 70 millivolts.

PZT and Electrode Enhancements of Mems Based Micro Heat Engine for Power Generation

2002 ◽  
Vol 730 ◽  
Author(s):  
A.L. Olson ◽  
L.M. Eakins ◽  
B.W. Olson ◽  
D.F. Bahr ◽  
C.D. Richards ◽  
...  
Keyword(s):  
Bottom Electrode ◽  
Mechanical Energy ◽  
Electrical Power ◽  
Heat Engine ◽  
Mems Devices ◽  
Stress Concentrations ◽  
Process Yield ◽  
Micro Heat Engine ◽  
Reducing Stress ◽  
And Diffusion

AbstractThe P3 Micro Heat Engine relies on a thin film PZT based transducer to convert mechanical energy into usable electrical power. In an effort to increase process yield for these were used on sputtered Ti/Pt bottom electrodes to compare roughness, grain size, and diffusion for annealing temperatures between 550 and 700 °C. For an optimized bottom electrode, process yield for various sized top electrodes were then studied for PZT thickness between 0.54 and 1.62 for reducing stress concentrations. Two PZT etching geometries on 2.3 μm thick Si/SiO2 membranes, with 1.5-3.5 mm side-lengths, were examined and one was used to increase the strain at failure by at least 40%. Integrating improvements in process yield and strain at failure, single PZT based MEMS devices capable of generating power of up to 1 mW and in excess of 2 volts have been demonstrated operating at frequencies between 300 and 1,100 Hz.

Experimental and Numerical Study of Evaporative Heat Transfer From Ten- Micro Microchannels

2006 ◽  
Author(s):  
Hoki Lee ◽  
T. A. Quy ◽  
C. D. Richards ◽  
D. F. Bahr ◽  
R. F. Richards
Keyword(s):  
Thin Film ◽  
Heat Transfer ◽  
Latent Heat ◽  
Numerical Study ◽  
Electrical Power ◽  
Three Dimensional ◽  
Working Fluid ◽  
Silicon Membrane ◽  
Transfer Rates ◽  
Evaporative Heat Transfer

Experimental and numerical results are presented for evaporative heat transfer from ten-micron square open-top channels. The radial channels are fabricated in epoxy photoresist on a two micron thick silicon membrane. The working fluid is pumped by capillary forces from a reservoir at the edge of the silicon membrane into the channels where it evaporates. The electrical power dissipated in a thin-film heater in the center of the membrane, the conduction heat transfer rate radially out of the membrane, and the rate of evaporation of the working fluid are measured. A three-dimensional finite difference, time-domain integration is used to predict sensible and latent heat transfer rates. Only 5-10% of the energy dissipated as heat in the thin film heater is carried away as latent heat by the evaporating working fluid. Computed temperatures and heat transfer rates are shown to match the experimental results.

A MEMS-Based Micro Heat Engine With Integrated Thermal Switch

2006 ◽  
Author(s):  
L. W. Weiss ◽  
J. H. Cho ◽  
D. J. Morris ◽  
D. F. Bahr ◽  
C. D. Richards ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Heat Engine ◽  
Working Fluid ◽  
Operating Pressure ◽  
Work Output ◽  
Silicon Membrane ◽  
Thermal Switch ◽  
Silicon Nitride Membrane ◽  
Micro Heat Engine ◽  
Membrane Deflection

This work details the effect of top membrane compliance on the performance of a MEMS based micro-heat engine and integrated thermal switch at operating speeds of 20, 40, and 100Hz and heat inputs of up to 60mJ per cycle. The engine consists of two flexible membranes encapsulating a volume of saturated working fluid. A thermal switch is used to intermittently reject heat from the engine to a constant temperature cooling sink. Mechanical work output is measured based on the engine's top membrane deflection and internal operating pressure. Three top membranes are considered; a 2micron thick silicon membrane, a 300nm thick silicon-nitride membrane, and a 3micron thick corrugated silicon membrane. The engine is shown to produce 1.0mW of mechanical power when operated at 100Hz.

Design of a Micro Heat Engine

2000 ◽  
Author(s):  
C. Xu ◽  
J. Hall ◽  
C. Richards ◽  
D. Bahr ◽  
R. Richards
Keyword(s):  
Combustion Engine ◽  
Thermal Power ◽  
Electrical Power ◽  
Heat Engine ◽  
Thermodynamic Cycle ◽  
Mechanical Power ◽  
Carnot Cycle ◽  
Mems Fabrication ◽  
Micro Heat Engine ◽  
External Combustion

Abstract The design for a totally new class of heat engine, a micro heat engine, which takes advantage of thermophysical phenomena unique to small scales, is introduced. The proposed engine is an external combustion engine, in which thermal power is converted to mechanical power through the use of a novel thermodynamic cycle which approaches the ideal vapor Carnot cycle. Mechanical power is converted into electrical power through the use of a piezoelectric generator. The generator, which takes the form of a flexible membrane, can be readily manufactured using MEMS fabrication techniques but still delivers high conversion efficiency. This approach eliminates the requirement to manufacture complex micromachines such as rotary compressors and turbines, resulting in a very simple but highly efficient device.

The P3 Micro Power Generation System

2001 ◽  
Author(s):  
C. Richards ◽  
D. Bahr ◽  
C.-G. Xu ◽  
R. Richards
Keyword(s):  
Power Generation ◽  
Combustion Engine ◽  
Thermal Power ◽  
Electrical Power ◽  
Heat Engine ◽  
Mechanical Power ◽  
Carnot Cycle ◽  
Generation System ◽  
Power Generation System ◽  
Micro Heat Engine

Abstract Work toward the development of a new MEMS power generation system, the P3 micro heat engine, is presented. The P3 micro heat engine is an external combustion engine, in which thermal power is converted to mechanical power through the use of a novel thermodynamic cycle that approaches the ideal vapor Carnot cycle. Mechanical power is converted into electrical power through the use of a thin-film piezoelectric membrane generator. A numerical model of the engine, SIMP3, is introduced. The model is used, first to illustrate the micro heat engine’s operation, and then to explore the optimization of the engine. The major parameters controlling the performance of the P3 micro engine are discussed.

A Micro Heat Engine for MEMS Power (Keynote Paper)

2002 ◽  
Author(s):  
C. D. Richards ◽  
D. F. Bahr ◽  
R. F. Richards
Keyword(s):  
Combustion Engine ◽  
Thermal Power ◽  
Electrical Power ◽  
Heat Engine ◽  
Thermodynamic Cycle ◽  
Mechanical Power ◽  
Batch Fabrication ◽  
Macro Scale ◽  
Micro Heat Engine ◽  
External Combustion

Progress in the development of a micro heat engine is presented. The prototype micro heat engine is an external combustion engine, in which thermal power is converted to mechanical power through the use of a novel thermodynamic cycle. Mechanical power is converted into electrical power through the use of a thin-film piezoelectric membrane generator. The design, well suited to photolithography-based batch fabrication methods, is unlike any conventionally manufactured macro-scale engine. In this paper, the design, fabrication and preliminary testing of a working prototype are discussed. The operation of the engine and its key component, the piezoelectric membrane generator is presented. For the first time, the production of electrical power by a dynamic micro heat engine is demonstrated.

Mechanical-to-Electrical Energy Conversion of Thin-Film Piezoelectric Diaphragms

2006 ◽  
Vol 973 ◽  
Author(s):  
Dylan J Morris ◽  
Michelle C Robinson ◽  
Leland W Weiss ◽  
Cecilia D Richards ◽  
Robert F Richards ◽  
...  
Keyword(s):  
Thin Film ◽  
Electromechanical Coupling ◽  
Electrical Power ◽  
Heat Engine ◽  
Piezoelectric Element ◽  
Electrical Energy ◽  
Initial Stresses ◽  
Heat Sources ◽  
Large Deflections ◽  
Electromechanical Transduction

ABSTRACTA micro (∼1 cm3) dynamic heat engine, capable of producing electrical power from lowgrade heat sources, utilizes a micro-machined diaphragm with a piezoelectric element as a The electromechanical coupling of a piezoelectric diaphragm under large initial stresses and/or large deflections – in the membrane limit – is described here. A simple model is derived for electromechanical transduction of a pressurized piezoelectric membrane and an experiment is described to measure it. Electromechanical coupling initially increases as the square of the center-point deflection as the residual stress is overcome. In the limit of large pressures, the electromechanical coupling approaches a limit that is predicted by the model.

scholarly journals Material properties and effect of preconditioning of human sclera, optic nerve, and optic nerve sheath

2021 ◽  
Author(s):  
Joseph Park ◽  
Andrew Shin ◽  
Somaye Jafari ◽  
Joseph L. Demer
Keyword(s):  
Optic Nerve ◽  
Mechanical Behavior ◽  
Material Properties ◽  
Biomechanical Properties ◽  
Ocular Tissues ◽  
Tangent Moduli ◽  
Nonlinear Mechanical ◽  
Human Eyes ◽  
Range Of Variation ◽  
Great Stress

AbstractThe optic nerve (ON) is a recently recognized tractional load on the eye during larger horizontal eye rotations. In order to understand the mechanical behavior of the eye during adduction, it is necessary to characterize material properties of the sclera, ON, and in particular its sheath. We performed tensile loading of specimens taken from fresh postmortem human eyes to characterize the range of variation in their biomechanical properties and determine the effect of preconditioning. We fitted reduced polynomial hyperelastic models to represent the nonlinear tensile behavior of the anterior, equatorial, posterior, and peripapillary sclera, as well as the ON and its sheath. For comparison, we analyzed tangent moduli in low and high strain regions to represent stiffness. Scleral stiffness generally decreased from anterior to posterior ocular regions. The ON had the lowest tangent modulus, but was surrounded by a much stiffer sheath. The low-strain hyperelastic behaviors of adjacent anatomical regions of the ON, ON sheath, and posterior sclera were similar as appropriate to avoid discontinuities at their boundaries. Regional stiffnesses within individual eyes were moderately correlated, implying that mechanical properties in one region of an eye do not reliably reflect properties of another region of that eye, and that potentially pathological combinations could occur in an eye if regional properties are discrepant. Preconditioning modestly stiffened ocular tissues, except peripapillary sclera that softened. The nonlinear mechanical behavior of posterior ocular tissues permits their stresses to match closely at low strains, although progressively increasing strain causes particularly great stress in the peripapillary region.

Sign in / Sign up

Export Citation Format

Share Document