Miniature Corrugated Diaphragm for Fiber-Optic-Linked Pressure Sensing (FOLPS)
Keyword(s):
This paper presents miniature (diameter less than 1.5 mm) corrugated parylene/Cr/parylene diaphragms that provide ultra sensitive load-deflection (±100 μm for ±1kPa) and reflective surface for optical sensing. The design, fabrication, and test results of the ultra low pressure transducer for biomedical applications are reported here. The diaphragms have been attached to stainless steel tubes that are suitable for most endoscopes.
2016 ◽
Vol 2016
(HiTEC)
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pp. 000051-000055
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Keyword(s):
2016 ◽
Vol 13
(4)
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pp. 163-168
1984 ◽
Vol 42
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pp. 662-663
1972 ◽