Toward Integrated Pressure Sensors for Temperatures up to 600°C

2016 ◽  
Vol 13 (4) ◽  
pp. 163-168
Author(s):  
Ayden Maralani ◽  
Levent Beker ◽  
Albert P. Pisano
Keyword(s):  
Pressure Transducer ◽  
Field Effect Transistors ◽  
Pressure Sensors ◽  
Harsh Environments ◽  
Test Results ◽  
Pressure Sensing ◽  
Pressure Transducers ◽  
Sensing Systems ◽  
Interface Circuitry ◽  
Type Pressure

The main objective of this study is to develop pressure-sensing systems by integrating pressure transducers with the interface circuitry in one package that can withstand harsh environments, particularly high temperatures up to 600°C. To achieve that, both pressure transducer and interface circuitry are individually required to operate and survive up to 600°C with acceptable degrees of reliability. This article reports performance evaluation of fabricated 4H-SiC Junction Field Effect Transistors along with differential pairs for use in the interface circuitry. The test results are very promising and show stable performances from 25°C up to 600°C. Moreover, design, fabrication, and early test (from 25°C up to 100°C) of an SiC-based circular diaphragm-type pressure transducer are also reported.

Towards Integrated Sensors for Environments with Temperatures up to 600 °C

2016 ◽  
Vol 2016 (HiTEC) ◽  
pp. 000051-000055 ◽  
Author(s):  
Ayden Maralani ◽  
Levent Beker ◽  
Albert P. Pisano
Keyword(s):  
Performance Evaluation ◽  
High Temperatures ◽  
Pressure Transducer ◽  
Harsh Environments ◽  
Test Results ◽  
Pressure Sensing ◽  
Sensing Systems ◽  
Interface Circuitry ◽  
Circular Diaphragm ◽  
Type Pressure

Abstract The main objective is to develop sensing systems by integrating transducers such as pressure sensing elements with the interface circuitry in one package that can withstand harsh environments, particularly high temperatures up to 600 °C. To achieve that, both pressure transducer and interface circuitry are individually required to operate and survive up to 600 °C with acceptable degrees of reliability. This paper reports performance evaluation of fabricated 4H-SiC JFETs along with differential pairs for use in the interface circuitry. The test results are very promising and show stable performances from 25 °C up to 600 °C. Moreover, design, fabrication, and early test of a SiC based circular diaphragm type pressure transducer is also reported.

Miniature Corrugated Diaphragm for Fiber-Optic-Linked Pressure Sensing (FOLPS)

2003 ◽  
Author(s):  
Hong-Seok Noh ◽  
Sangkyung Kim ◽  
Peter J. Hesketh ◽  
Hua Mao ◽  
Lid Wong
Keyword(s):  
Stainless Steel ◽  
Pressure Transducer ◽  
Biomedical Applications ◽  
Fiber Optic ◽  
Optical Sensing ◽  
Low Pressure ◽  
Test Results ◽  
Steel Tubes ◽  
Pressure Sensing ◽  
Reflective Surface

This paper presents miniature (diameter less than 1.5 mm) corrugated parylene/Cr/parylene diaphragms that provide ultra sensitive load-deflection (±100 μm for ±1kPa) and reflective surface for optical sensing. The design, fabrication, and test results of the ultra low pressure transducer for biomedical applications are reported here. The diaphragms have been attached to stainless steel tubes that are suitable for most endoscopes.

Correcting for Response Lag in Unsteady Pressure Measurements in Water

1993 ◽  
Vol 115 (4) ◽  
pp. 676-679 ◽  
Author(s):  
Rand N. Conger ◽  
B. R. Ramaprian
Keyword(s):  
Dynamic Response ◽  
Pressure Transducer ◽  
Water Channel ◽  
Inadequate Response ◽  
Pressure Measurements ◽  
Pressure Transducers ◽  
Pitching Airfoil ◽  
Unsteady Pressure ◽  
Unsteady Pressure Measurements ◽  
Type Pressure

There is not much information available on the use of diaphragm-type pressure transducers for the measurement of unsteady pressures in liquids. A procedure for measuring the dynamic response of a pressure transducer in such applications and correcting for its inadequate response is discussed in this report. An example of the successful use of this method to determine unsteady surface pressures on a pitching airfoil in a water channel is presented.

scholarly journals Calibration values uninfluenced by the kind of pressure medium and the setting posture for quartz Bourdon-type pressure transducers

ACTA IMEKO ◽  
2019 ◽  
Vol 8 (3) ◽  
pp. 25
Author(s):  
Hideaki Iizumi ◽  
Hiroaki Kajikawa ◽  
Tokihiko Kobata
Keyword(s):  
Pressure Measurement ◽  
Pressure Transducer ◽  
Point Symmetry ◽  
Maximum Difference ◽  
Pressure Transducers ◽  
Pressure Medium ◽  
The Difference ◽  
Gas Medium ◽  
Type Pressure

<p class="Abstract">The effects of the kind of gas medium and the setting posture on the calibration values of a quartz Bourdon-type pressure transducer mounted vertically are evaluated in this study. The transducer, at the upward and downward settings, was calibrated both with nitrogen and with helium. The difference between the calibration values of the transducer with nitrogen at the upward and downward settings was about 7.0 kPa at 100 MPa. At the same setting posture, the maximum difference in the calibration values between nitrogen and helium was 3.4 kPa. For precise pressure measurement, it is recommended that the transducers are used with the same pressure medium and the same setting posture with which they were calibrated. The methods of reducing the effects of both the kind of gas medium and the setting posture are discussed. The average of two calibration values at the upward setting and at the downward setting was not affected by the kind of gas medium. When the sensing elements of two pressure transducers arranged in point symmetry with each other, the average values of two transducers were independent of both the kind of gas medium and the setting posture.</p>

An Air-Cooled Jacket Designed to Protect Unsteady Pressure Transducers at Elevated Temperatures in Gas Turbine Engines

2002 ◽  
Author(s):  
Paul C. Ivey ◽  
Derek G. Ferguson
Keyword(s):  
Gas Turbine ◽  
Pressure Transducer ◽  
Elevated Temperatures ◽  
Thermal Protection ◽  
Pressure Sensors ◽  
Air Cooling ◽  
Pressure Transducers ◽  
Unsteady Pressure ◽  
Cooling Media ◽  
Aero Engines

Current unsteady pressure sensors have a limiting upper temperature range and with few exceptions cannot survive at the temperatures experienced in gas turbine aero-engines. This paper describes a design and development study of an air-cooled commercially available unsteady pressure transducer capable of operation at temperatures exceeding 900 °C. The research objective for this work is the following: To design a cooling adapter, using air as the cooling media, capable of protecting a standard unsteady pressure transducer, whose maximum operating temperature is around 250 °C. in a gas turbine engine environment where temperatures typically reach 800–l500 °C. In addition the provision of thermal protection must not adversely effect the measurement of unsteady pressure and the cooling adapter and transducer assembly must be small enough to access critical parts of the engine. Current transducer can operate at temperatures exceeding 250 °C; the purpose of this paper is to demonstrate the additional protection offered by air-cooling. The paper describes the validation experiments conducted for this design, the level of thermal protection achieved and the frequency response of the transducer/cooling jacket assembly.

scholarly journals Offset stable piezoresistive high-temperature pressure sensors based on silicon

2016 ◽  
Vol 5 (1) ◽  
pp. 197-203 ◽  
Author(s):  
Robert Täschner ◽  
Erik Hiller ◽  
Michael Blech
Keyword(s):  
Pressure Sensors ◽  
Wafer Level ◽  
Pressure Sensing ◽  
Temperature Range ◽  
Sensing Systems ◽  
Sensitivity Changes ◽  
The Moment ◽  
Low Sensitivity ◽  
Application Fields ◽  
Silicon Based

Abstract. The exploitation of new application fields and the drive to size reduction even in highly stable pressure sensing systems makes the extension of the operating temperature range of the microelectromechanical sensors (MEMS) essential. For this reason a silicon-based pressure sensor with an application temperature ranging up to 300 °C and the associated manufacturing technology was developed. With special design and manufacturing approaches mounting stress-insensitive sensors with high linearity, excellent offset stability, low hysteresis and low sensitivity changes over the entire temperature range were developed. At the moment, the sensors are tested till 300 °C at wafer level and between 135 and 210 °C as a first-level package.

Measurement of the Air Pressure for a Rotary Vane Compressor

2003 ◽  
Author(s):  
Yuan Mao Huang ◽  
Sheng An Yang
Keyword(s):  
Frequency Converter ◽  
Air Pressure ◽  
Cover Plate ◽  
Rotary Compressor ◽  
Compression Phase ◽  
Pressure Transducers ◽  
Compressor Rotor ◽  
Two Phases ◽  
Rotary Vane Compressor ◽  
Type Pressure

This study introduces an experimental method that can measure air pressures in the vane segments when a sliding-vane rotary compressor performs suction and compression phases in stable or unstable rotational speeds. When the air pressures of these two phases can be measured, the intake effect of the compressor’s inlet and the seal effect of the vane segments can be evaluated, respectively. Because a frequency converter provides unstable rotational speeds when it controls rotational speeds of a motor with a compressor, an encoder mounted on the output shaft of the motor was applied to record the angular location of the compressor rotor. Two strain gauge type pressure transducers were inserted into the cover plate of the compressor to measure air pressures in the vane segments. Comparing the signals of the encoder with pressure transducers, the air pressures in completions of suction and compression phases could be determined in stable or unstable rotational speeds. The air pressures when the compressor performed suction and compression phases were 99.5 kPa and 153 kPa, respectively, in 1400 rpm. The air pressure when the compressor performed suction phase decreased with the rotational speed faster than 800 rpm. The size or shape of the inlet port of the compressor should be enlarged or modified to provide the suction air pressure without dropping too much. The designed air pressure when the compressor performed compression phase was 244 kPa in 140 rpm, the manufacture precision of the compressor should be increased to decrease leakage.

CMOS-MEMS Based Current Mirror MOSFET Embedded Pressure Sensor for Healthcare and Biomedical Applications

2013 ◽  
Vol 647 ◽  
pp. 315-320 ◽  
Author(s):  
Pradeep Kumar Rathore ◽  
Brishbhan Singh Panwar
Keyword(s):  
Pressure Sensor ◽  
Biomedical Applications ◽  
Circuit Simulation ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Cmos Technology ◽  
Current Mirror ◽  
Sensing Element ◽  
Pressure Sensing ◽  
Cmos Mems

This paper reports on the design and optimization of current mirror MOSFET embedded pressure sensor. A current mirror circuit with an output current of 1 mA integrated with a pressure sensing n-channel MOSFET has been designed using standard 5 µm CMOS technology. The channel region of the pressure sensing MOSFET forms the flexible diaphragm as well as the strain sensing element. The piezoresistive effect in MOSFET has been exploited for the calculation of strain induced carrier mobility variation. The output transistor of the current mirror forms the active pressure sensing MOSFET which produces a change in its drain current as a result of altered channel mobility under externally applied pressure. COMSOL Multiphysics is utilized for the simulation of pressure sensing structure and Tspice is employed to evaluate the characteristics of the current mirror pressure sensing circuit. Simulation results show that the pressure sensor has a sensitivity of 10.01 mV/MPa. The sensing structure has been optimized through simulation for enhancing the sensor sensitivity to 276.65 mV/MPa. These CMOS-MEMS based pressure sensors integrated with signal processing circuitry on the same chip can be used for healthcare and biomedical applications.

Ultrasensitive, flexible, and low-cost nanoporous piezoresistive composites for tactile pressure sensing

Nanoscale ◽  
2019 ◽  
Vol 11 (6) ◽  
pp. 2779-2786 ◽  
Author(s):  
Jing Li ◽  
Santiago Orrego ◽  
Junjie Pan ◽  
Peisheng He ◽  
Sung Hoon Kang
Keyword(s):  
Carbon Nanotube ◽  
Polymer Composites ◽  
Low Cost ◽  
Pressure Sensors ◽  
Nanoporous Carbon ◽  
Pressure Sensing ◽  
Etching Method ◽  
Piezoresistive Pressure Sensors

We report a facile sacrificial casting–etching method to synthesize nanoporous carbon nanotube/polymer composites for ultra-sensitive and low-cost piezoresistive pressure sensors.

Flexible pressure sensing film based on ultra-sensitive SWCNT/PDMS spheres for monitoring human pulse signals

2015 ◽  
Vol 3 (27) ◽  
pp. 5436-5441 ◽  
Author(s):  
Yan-Long Tai ◽  
Zhen-Guo Yang
Keyword(s):  
Pressure Sensors ◽  
Pressure Sensing ◽  
Prosthetic Limbs ◽  
Electronic Skin ◽  
Essential Components ◽  
Biomedical Diagnostics ◽  
Healthcare Monitoring ◽  
Flexible Pressure Sensors ◽  
Human Healthcare

Flexible pressure sensors are essential components of an electronic skin for future attractive applications ranging from human healthcare monitoring to biomedical diagnostics to robotic skins to prosthetic limbs.

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