Influence of van der Waals Forces on Electrostatically Actuated MEMS/NEMS Circular Plates

2011 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Iris Alvarado
Keyword(s):  
Circular Plate ◽  
Multiple Scales ◽  
Van Der Waals ◽  
Primary Resonance ◽  
Circular Plates ◽  
Weakly Nonlinear ◽  
Electrostatically Actuated ◽  
Ground Plate ◽  
Scale Surface ◽  
Two Bodies

This paper deals with electrostatically actuated micro and nano-electromechanical (MEMS/NEMS) circular plates. The system under investigation consists of two bodies, a deformable and conductive circular plate placed above a fixed, rigid and conductive ground plate. The deformable circular plate is electrostatically actuated by applying an AC voltage between the two plates. Nonlinear parametric resonance and pull-in occur at certain frequencies and relatively large AC voltage, respectively. Such phenomena are useful for applications such as sensors, actuators, switches, micro-pumps, micro-tweezers, chemical and mass sensing, and micro-mirrors. A mathematical model of clamped circular MEMS/NEMS electrostatically actuated plates has been developed. Since the model is in the micro- and nano-scale, surface forces, van der Waals and/or Casimir, acting on the plate are included. A perturbation method, the Method of Multiple Scales (MMS), is used for investigating the case of weakly nonlinear MEMS/NEMS circular plates. Two time scales, fast and slow, are considered in this work. The amplitude-frequency and phase-frequency response of the plate in the case of primary resonance are obtained and discussed.

On Electrostatically Actuated CNT Bio-Sensors

2011 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Cone S. Salinas Trevino
Keyword(s):  
Carbon Nanotubes ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Van Der Waals ◽  
Primary Resonance ◽  
Mass Detection ◽  
Electrostatically Actuated ◽  
Sensing Applications ◽  
Ground Plate ◽  
Frequency Phase

This paper deals with electrostatically actuated Carbon NanoTubes (CNT) cantilevers for bio-sensing applications. There are three kinds of forces acting on the CNT cantilever: electrostatic, elastostatic, and van der Waals. The van der Waals forces are significant for values of 50 nm or lower of the gap between the CNT and the ground plate. As both forces electrostatic and van der Waals are nonlinear, and the CNT electrostatic actuation is given by AC voltage, the CNT dynamics is nonlinear parametric. The method of multiple scales is used to investigate the system under soft excitations and/or weakly nonlinearities. The frequency-amplitude and frequency-phase behavior are found in the case of primary resonance. The CNT bio-sensor is to be used for mass detection applications.

Primary Resonance Voltage Response of Electrostatically Actuated M/NEMS Circular Plate Resonators

2014 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Reynaldo Oyervides
Keyword(s):  
Casimir Force ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Excitation Frequency ◽  
Primary Resonance ◽  
Voltage Response ◽  
Circular Plates ◽  
Amplitude Response ◽  
Weakly Nonlinear ◽  
Electrostatically Actuated

This paper investigates the voltage-amplitude response of soft AC electrostatically actuated M/NEMS clamped circular plates. AC frequency is near half natural frequency of the plate. This results in primary resonance. The system is analytically modeled using the Method of Multiple Scales (MMS). The system is assumed weakly nonlinear. The behavior of the system including pull-in instability as the AC voltage is swept up and down while the excitation frequency is constant is reported. The effects of detuning frequency, damping, Casimir force, and van der Waals force are reported as well.

Reduced Order Model of Electrostatically Actuated Carbon Nanotube Cantilever Biosensors for Primary Resonance

2013 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Le Luo
Keyword(s):  
Multiple Scales ◽  
Van Der Waals ◽  
Primary Resonance ◽  
Reduced Order Model ◽  
Mass Detection ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Carbon Nano Tubes ◽  
Ground Plate

This paper investigates electrostatically actuated Carbon Nano-Tubes (CNT) cantilevers biosensors using the Reduced Order Model (ROM) method. Forces acting on the CNT are electrostatic, damping, and van der Waals. The electrostatic actuation is given by soft AC voltage. Van der Waals forces are significant for gaps between the CNT and a ground plate lower than 100 nm. Both forces electrostatic and van der Waals are nonlinear. CNT undergoes nonlinear parametric dynamics. ROM is used to investigate the system under soft excitations and/or weak nonlinearities. The frequency-amplitude response is found in the case of primary resonance and compared to the Method of Multiple Scales (MMS). The CNT biosensor is to be used for mass detection applications.

Comparison of Frequency Response of Primary Resonance of DWCNT and CNT Resonators Under Electrostatic Actuation

2019 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Ezequiel Juarez
Keyword(s):  
Carbon Nanotubes ◽  
Multiple Scales ◽  
Van Der Waals ◽  
Primary Resonance ◽  
Electrostatic Actuation ◽  
Amplitude Response ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Double Walled Carbon Nanotubes ◽  
Walled Carbon Nanotubes

Abstract This paper deals with the frequency-amplitude response of primary resonance of electrostatically actuated Double-Walled Carbon Nanotubes (DWCNT) and Single-Walled Carbon Nanotubes (SWCNT) cantilever resonators. Their responses are compared. Both the DWCNT and SWCNT are modeled as Euler-Bernoulli cantilever beams. Electrostatic and damping forces are applied on both types of resonators. An AC voltage provides a soft electrostatic actuation. For the DWCNT, intertube van der Waals forces are present between the carbon nanotubes, coupling the deflections of the tubes and acting as a nonlinear spring between the two carbon nanotubes. Electrostatic (for SWCNT and DWCNT) and intertube van der Waals (for DWCNT) forces are nonlinear. Both resonators undergo nonlinear parametric excitation. The Method of Multiple Scales (MMS) is used to investigate the systems under soft excitations and weak nonlinearities. A 2-Term Reduced-Order-Model (ROM) is numerically solved for stability analysis using AUTO-07P, a continuation and bifurcation software. The coaxial vibrations of DWCNT are considered in this work, in order to draw comparisons between DWCNT and SWCNT. Effects of damping and voltage of the frequency-amplitude response are reported.

On Primary Resonance of Electrostatically Actuated Double Walled Carbon Nanotube Cantilever Biosensors

2015 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Ezequiel Juarez
Keyword(s):  
Carbon Nanotubes ◽  
Multiple Scales ◽  
Van Der Waals ◽  
Primary Resonance ◽  
Harmonic Balance Method ◽  
Van Der Waals Forces ◽  
Mass Sensing ◽  
Electrostatically Actuated ◽  
Double Walled Carbon Nanotubes ◽  
Walled Carbon Nanotubes

This paper investigates electrostatically actuated Double Walled Carbon Nanotubes (DWCNT) cantilever biosensors using the Method of Multiple Scales (MMS) and the Harmonic Balance Method (HBM). Forces acting on the outer tube of the DWCNT are electrostatic, damping, and van der Waals, while only van der Waals acts on the inner tube. The electrostatic actuation is provided by a soft AC voltage. Van der Waals forces are present between the carbon nanotubes, coupling the deflections of the tubes; herein, for modal coordinate transformation, only the linear term of the van der Waals force will be considered. The nonlinearity of the motion is produced by the electrostatic and van der Waals forces. The DWCNT undergoes nonlinear parametric dynamics. MMS is employed to investigate the system under soft excitations and/or weak nonlinearities. The frequency-amplitude response is found in the case of primary resonance. DWCNTs are modelled after the Euler-Bernoulli cantilever beam. The expected nonlinear dynamic behavior is important to improve DWCNT resonator sensitivity in the application of mass sensing.

Primary Resonance of MEMS/NEMS Circular Plate Biosensors

2014 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Reynaldo Oyervides
Keyword(s):  
Natural Frequency ◽  
Circular Plate ◽  
Dna Detection ◽  
Van Der Waals ◽  
Primary Resonance ◽  
Van Der Waals Forces ◽  
Electrostatic Actuation ◽  
Circular Plates ◽  
Saddle Node Bifurcation ◽  
Saddle Node

This investigation deals with M/NEMS circular plates under electrostatic actuation. Such structures can be used as resonator sensors for medicine and biology applications such as virus, bacteria or DNA detection. The system consists of a clamped circular plate over a ground. The actuation of the plate is done through an AC voltage whose frequency is near half natural frequency of the plate. This produces a primary resonance to be used afterwards for sensing purposes. It is showed that a saddle-node bifurcation occurs. The effects of damping, voltage, Casimir, and van der Waals forces are predicted.

Reduced Order Model of Parametric Resonance of Electrostatically Actuated CNT Cantilever Resonators

2013 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Le Luo
Keyword(s):  
Parametric Resonance ◽  
Multiple Scales ◽  
Van Der Waals ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Carbon Nano Tubes ◽  
Ground Plate ◽  
Phase Behaviors

This paper deals with electrostatically actuated Carbon Nano-Tubes (CNT) cantilevers using Reduced Order Model (ROM) method. Forces acting on the CNT cantilever are electrostatic, van der Waals, and damping. The van der Waals forces are significant for values of 50 nm or lower of the gap between the CNT and the ground plate. As both forces electrostatic and van der Waals are nonlinear, and the CNT electrostatic actuation is given by AC voltage, the CNT undergoes nonlinear parametric dynamics. The Method of Multiple Scales (MMS), and ROM are used to investigate the system under soft excitations and/or weak nonlinearities. The frequency-amplitude and frequency-phase behaviors are found in the case of parametric resonance.

CNT Cantilevers Under Soft AC Actuation of Frequency Near Half Natural Frequency for Bio-Sensing Applications

2012 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Le Luo
Keyword(s):  
Phase Behavior ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Van Der Waals ◽  
Mass Detection ◽  
Electrostatically Actuated ◽  
Sensing Applications ◽  
Carbon Nano Tubes ◽  
Ground Plate ◽  
Frequency Phase

This paper deals with electrostatically actuated Carbon Nano-Tubes (CNT) cantilevers for bio-sensing applications. Four forces act on the CNT cantilever, namely electrostatic, elastostatic, van der Waals, and damping. The van der Waals forces are significant for values of 50 nm or lower of the gap between the CNT and the ground plate. As both forces electrostatic and van der Waals are nonlinear, and the CNT electrostatic actuation is given by AC voltage, the CNT undergoes nonlinear parametric dynamics. The method of multiple scales (MMS) is used to investigate the system under soft excitations and/or weak nonlinearities. The frequency-amplitude and frequency-phase behavior are reported. The CNT bio-sensor is to be used for mass detection applications.

Comparison of Frequency Response of Parametric Resonance of DWCNT and SWCNT Under Electrostatic Actuation

2019 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Ezequiel Juarez
Keyword(s):  
Carbon Nanotubes ◽  
Frequency Response ◽  
Parametric Resonance ◽  
Multiple Scales ◽  
Van Der Waals ◽  
Van Der Waals Force ◽  
Beam Model ◽  
Weakly Nonlinear ◽  
Electrostatically Actuated ◽  
Walled Carbon Nanotubes

Abstract This paper deals with electrostatically actuated Double-Walled Carbon Nanotubes (DWCNT) and Single-Walled Carbon Nanotubes (SWCNT) cantilever resonators. Frequency response of parametric resonance is investigated. Euler-Bernoulli cantilever beam model is used for both DWCNT and SWCNT. Electrostatic and viscous damping forces are applied on both types of resonators, DWCNT and SWCNT. In this investigation, soft AC voltage excitation is assumed. For the DWCNT, an intertube van der Waals force is present between the two concentric carbon nanotubes (CNTs), coupling their motion and acting as a nonlinear spring. The nonlinearities in the vibration are provided by the electrostatic (both SWCNT and DWCNT) and intertube van der Waals forces (DWCNT). The Method of Multiple Scales (MMS) is a perturbation method that provides uniformly valid approximations for weakly nonlinear systems. A Reduced-Order-Model (ROM) is developed and numerically solved using AUTO-07P (bifurcation and continuation software). Since large tip deflections are investigated in this paper, only coaxial vibration of the DWCNT is considered. Parametric resonance is investigated, as well as the influences of damping and voltage. Lastly, the effect of intertube van der Waals force on the bifurcation and stability of the DWCNT is reported.

Parametric Resonance of MEMS Circular Plate Resonators

2015 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Reynaldo Oyervides
Keyword(s):  
Frequency Response ◽  
Natural Frequency ◽  
Circular Plate ◽  
Parametric Resonance ◽  
Elastic Plate ◽  
Electrostatic Force ◽  
Circular Plates ◽  
Electrostatically Actuated ◽  
Sensing Applications ◽  
Ground Plate

This paper investigates parametric resonance of electrostatically actuated MEMS circular plates for resonator sensing applications. The system consists of a clamped circular elastic plate over a ground plate. Soft AC voltage of frequency near natural frequency of the plate gives the electrostatic force that leads the elastic plate into vibration, more specifically into parametric resonance which can be used afterwards for biosensing purposes. Frequency response and corresponding bifurcations are reported. The effects of damping and voltage are predicted.

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