Primary Resonance Voltage Response of Electrostatically Actuated M/NEMS Circular Plate Resonators

2014 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Reynaldo Oyervides
Keyword(s):  
Casimir Force ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Excitation Frequency ◽  
Primary Resonance ◽  
Voltage Response ◽  
Circular Plates ◽  
Amplitude Response ◽  
Weakly Nonlinear ◽  
Electrostatically Actuated

This paper investigates the voltage-amplitude response of soft AC electrostatically actuated M/NEMS clamped circular plates. AC frequency is near half natural frequency of the plate. This results in primary resonance. The system is analytically modeled using the Method of Multiple Scales (MMS). The system is assumed weakly nonlinear. The behavior of the system including pull-in instability as the AC voltage is swept up and down while the excitation frequency is constant is reported. The effects of detuning frequency, damping, Casimir force, and van der Waals force are reported as well.

ROM of Primary Resonance of Electrostatically Actuated MEMS/NEMS Plates

2014 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Reynaldo Oyervides
Keyword(s):  
Casimir Force ◽  
Van Der Waals ◽  
Primary Resonance ◽  
Voltage Response ◽  
Voltage Amplitude ◽  
Circular Plates ◽  
Order Model ◽  
Amplitude Response ◽  
Reduced Order ◽  
Electrostatically Actuated

This paper utilizes Reduced Order Model (ROM) method to investigate the voltage-amplitude response of electrostatically actuated M/NEMS clamped circular plates. Soft AC voltage at frequency near half natural frequency of the plate is used. This results in primary resonance of the system. The effects of nonlinearities of the system including pull-in instability on the voltage-amplitude response are investigated. Namely, the effects of detuning frequency, damping, Casimir force, and van der Waals force on the voltage response of clamped circular plates are reported. Casimir and van der Waals forces are found to have significant effects on the response of clamped circular plates and must be considered to accurately model and predict the behavior of the system.

Voltage Response of Primary Resonance of Electrostatically Actuated MEMS Clamped Circular Plate Resonators

2016 ◽  
Vol 11 (4) ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Reynaldo Oyervides
Keyword(s):  
Natural Frequency ◽  
Multiple Scales ◽  
Primary Resonance ◽  
Micro Electro Mechanical System ◽  
Voltage Response ◽  
Voltage Amplitude ◽  
Amplitude Response ◽  
Weakly Nonlinear ◽  
Electrostatically Actuated ◽  
Sensing Applications

This paper investigates the voltage–amplitude response of soft alternating current (AC) electrostatically actuated micro-electro-mechanical system (MEMS) clamped circular plates for sensing applications. The case of soft AC voltage of frequency near half natural frequency of the plate is considered. Soft AC produces small to very small amplitudes away from resonance zones. Nearness to half natural frequency results in primary resonance of the system, which is investigated using the method of multiple scales (MMS) and numerical simulations using reduced order model (ROM) of seven terms (modes of vibration). The system is assumed to be weakly nonlinear. Pull-in instability of the voltage–amplitude response and the effects of detuning frequency and damping on the response are reported.

Influence of van der Waals Forces on Electrostatically Actuated MEMS/NEMS Circular Plates

2011 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Iris Alvarado
Keyword(s):  
Circular Plate ◽  
Multiple Scales ◽  
Van Der Waals ◽  
Primary Resonance ◽  
Circular Plates ◽  
Weakly Nonlinear ◽  
Electrostatically Actuated ◽  
Ground Plate ◽  
Scale Surface ◽  
Two Bodies

This paper deals with electrostatically actuated micro and nano-electromechanical (MEMS/NEMS) circular plates. The system under investigation consists of two bodies, a deformable and conductive circular plate placed above a fixed, rigid and conductive ground plate. The deformable circular plate is electrostatically actuated by applying an AC voltage between the two plates. Nonlinear parametric resonance and pull-in occur at certain frequencies and relatively large AC voltage, respectively. Such phenomena are useful for applications such as sensors, actuators, switches, micro-pumps, micro-tweezers, chemical and mass sensing, and micro-mirrors. A mathematical model of clamped circular MEMS/NEMS electrostatically actuated plates has been developed. Since the model is in the micro- and nano-scale, surface forces, van der Waals and/or Casimir, acting on the plate are included. A perturbation method, the Method of Multiple Scales (MMS), is used for investigating the case of weakly nonlinear MEMS/NEMS circular plates. Two time scales, fast and slow, are considered in this work. The amplitude-frequency and phase-frequency response of the plate in the case of primary resonance are obtained and discussed.

Voltage Response of Parametric Resonance of MEMS Circular Plates Under Hard Excitations

2019 ◽  
Author(s):  
Julio S. Beatriz ◽  
Dumitru I. Caruntu
Keyword(s):  
Parametric Resonance ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Electrostatic Force ◽  
Voltage Response ◽  
Circular Plates ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Modes Of Vibration

Abstract This work deals with the voltage response of parametric resonance of electrostatically actuated microelectromechanical (MEMS) circular plates under hard excitations. Method of Multiple Scales (MMS) and Reduced Order Model (ROM) method using two modes of vibration are used to predict the voltage-amplitude response of the MEMS circular plates. ROM is solved using AUTO 07p, a software package for continuation and bifurcation. MMS used in this paper has one term in the electrostatic force being considered significant. This is the way MMS is used to model hard excitations. MMS shows results similar to those of ROM at lower amplitudes and lower voltages. The differences between the two methods, MMS and ROM, are significant in high amplitudes for all voltages, and the differences are significant in all amplitudes for larger voltages. Significant differences can be noted in the effect of different parameters such as the detuning frequency and damping on the voltage response. ROM AUTO 07p is calibrated using ROM time responses in which the ROM is solved using the solver ode15s in Matlab.

Circular Plates Under Hard Excitations to Include Casimir Effect: Amplitude-Voltage Response of Superharmonic Resonance of Second Order

2020 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Julio Beatriz ◽  
Jonathan Perez
Keyword(s):  
Circular Plate ◽  
Casimir Effect ◽  
Second Order ◽  
Peak Amplitude ◽  
Voltage Response ◽  
Voltage Amplitude ◽  
Circular Plates ◽  
Amplitude Response ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated

Abstract This paper deals with voltage-amplitude response of superharmonic resonance of second order of electrostatically actuated clamped MEMS circular plates. A flexible MEMS circular plate, parallel to a ground plate, and under AC voltage, constitute the structure under consideration. Hard excitations due to voltage large enough and AC frequency near one fourth of the natural frequency of the MEMS plate resonator lead the MEMS plate into superharmonic resonance of second order. These excitations produce resonance away from the primary resonance zone. No DC component is included in the voltage applied. The equation of motion of the MEMS plate is solved using two modes of vibration reduced order model (ROM), that is then solved through a continuation and bifurcation analysis using the software package AUTO 07P. This predicts the voltage-amplitude response of the electrostatically actuated MEMS plate. Also, a numerical integration of the system of differential equations using Matlab is used to produce time responses of the system. A typical MEMS silicon circular plate resonator is used to conduct numerical simulations. For this resonator the quantum dynamics effects such as Casimir effect are considered. Also, the Method of Multiple Scales (MMS) is used in this work. All methods show agreement for dimensionless voltage values less than 6. The amplitude increases with the increase of voltage, except around the dimensionless voltage value of 4, where the resonance shows two saddle-node bifurcations and a peak amplitude significantly larger than the amplitudes before and after the dimensionless voltage of 4. A light softening effect is present. The pull-in dimensionless voltage is found to be around 16. The effects of damping and frequency on the voltage response are reported. As the damping increases, the peak amplitude decreases. while the pull-in voltage is not affected. As the frequency increases, the peak amplitude is shifted to lower values and lower voltage values. However, the pull-in voltage and the behavior for large voltage values are not affected.

scholarly journals On the Application of the Multiple Scales Method on Electrostatically Actuated Resonators

2019 ◽  
Vol 14 (4) ◽  
Author(s):  
Saad Ilyas ◽  
Feras K. Alfosail ◽  
Mohammad I. Younis
Keyword(s):  
Analytical Solution ◽  
Multiple Scales ◽  
Excitation Frequency ◽  
Primary Resonance ◽  
Equation Of Motion ◽  
Higher Order ◽  
Resonance Excitation ◽  
Multiple Time Scales ◽  
Multiple Time ◽  
Electrostatically Actuated

We investigate modeling the dynamics of an electrostatically actuated resonator using the perturbation method of multiple time scales (MTS). First, we discuss two approaches to treat the nonlinear parallel-plate electrostatic force in the equation of motion and their impact on the application of MTS: expanding the force in Taylor series and multiplying both sides of the equation with the denominator of the forcing term. Considering a spring–mass–damper system excited electrostatically near primary resonance, it is concluded that, with consistent truncation of higher-order terms, both techniques yield same modulation equations. Then, we consider the problem of an electrostatically actuated resonator under simultaneous superharmonic and primary resonance excitation and derive a comprehensive analytical solution using MTS. The results of the analytical solution are compared against the numerical results obtained by long-time integration of the equation of motion. It is demonstrated that along with the direct excitation components at the excitation frequency and twice of that, higher-order parametric terms should also be included. Finally, the contributions of primary and superharmonic resonance toward the overall response of the resonator are examined.

Frequency Response of Parametric Resonance of Electrostatically Actuated Circular Plates Under Hard Excitations

2019 ◽  
Author(s):  
Julio Beatriz ◽  
Dumitru I. Caruntu
Keyword(s):  
Frequency Response ◽  
Parametric Resonance ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Reduced Order Model ◽  
Circular Plates ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Modes Of Vibration

Abstract In this paper, the Method of Multiple Scales, and the Reduced Order Model method of two modes of vibration are used to investigate the amplitude-frequency response of parametric resonance of electrostatically actuated circular plates under hard excitations. Results show that the Method of Multiple Scales is accurate for low voltages. However, it starts to separate from the Reduced Order Model results as the voltage values are larger. The Method of Multiple Scales is good for low amplitudes and weak non-linearities. Furthermore the Reduced Order Model running with AUTO 07p is validated and calibrated using the 2 Term ROM time responses.

Comparison of Frequency Response of Primary Resonance of DWCNT and CNT Resonators Under Electrostatic Actuation

2019 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Ezequiel Juarez
Keyword(s):  
Carbon Nanotubes ◽  
Multiple Scales ◽  
Van Der Waals ◽  
Primary Resonance ◽  
Electrostatic Actuation ◽  
Amplitude Response ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Double Walled Carbon Nanotubes ◽  
Walled Carbon Nanotubes

Abstract This paper deals with the frequency-amplitude response of primary resonance of electrostatically actuated Double-Walled Carbon Nanotubes (DWCNT) and Single-Walled Carbon Nanotubes (SWCNT) cantilever resonators. Their responses are compared. Both the DWCNT and SWCNT are modeled as Euler-Bernoulli cantilever beams. Electrostatic and damping forces are applied on both types of resonators. An AC voltage provides a soft electrostatic actuation. For the DWCNT, intertube van der Waals forces are present between the carbon nanotubes, coupling the deflections of the tubes and acting as a nonlinear spring between the two carbon nanotubes. Electrostatic (for SWCNT and DWCNT) and intertube van der Waals (for DWCNT) forces are nonlinear. Both resonators undergo nonlinear parametric excitation. The Method of Multiple Scales (MMS) is used to investigate the systems under soft excitations and weak nonlinearities. A 2-Term Reduced-Order-Model (ROM) is numerically solved for stability analysis using AUTO-07P, a continuation and bifurcation software. The coaxial vibrations of DWCNT are considered in this work, in order to draw comparisons between DWCNT and SWCNT. Effects of damping and voltage of the frequency-amplitude response are reported.

On Electrostatically Actuated CNT Bio-Sensors

2011 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Cone S. Salinas Trevino
Keyword(s):  
Carbon Nanotubes ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Van Der Waals ◽  
Primary Resonance ◽  
Mass Detection ◽  
Electrostatically Actuated ◽  
Sensing Applications ◽  
Ground Plate ◽  
Frequency Phase

This paper deals with electrostatically actuated Carbon NanoTubes (CNT) cantilevers for bio-sensing applications. There are three kinds of forces acting on the CNT cantilever: electrostatic, elastostatic, and van der Waals. The van der Waals forces are significant for values of 50 nm or lower of the gap between the CNT and the ground plate. As both forces electrostatic and van der Waals are nonlinear, and the CNT electrostatic actuation is given by AC voltage, the CNT dynamics is nonlinear parametric. The method of multiple scales is used to investigate the system under soft excitations and/or weakly nonlinearities. The frequency-amplitude and frequency-phase behavior are found in the case of primary resonance. The CNT bio-sensor is to be used for mass detection applications.

ROM of Superharmonic Resonance of Fourth Order of Electrostatically Actuated Clamped MEMS Circular Plates: Voltage Response

2020 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Julio Beatriz
Keyword(s):  
Circular Plate ◽  
Fourth Order ◽  
Peak Amplitude ◽  
Voltage Response ◽  
Voltage Amplitude ◽  
Circular Plates ◽  
Amplitude Response ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Resonance Zone

Abstract This paper investigates the voltage-amplitude response of superharmonic resonance of fourth order of electrostatically actuated clamped MEMS circular plates. The system consists of flexible MEMS circular plate parallel to a ground plate. Hard excitations (voltage large enough) and AC voltage of frequency near one eight of the natural frequency of the MEMS plate resonator lead it into a superharmonic resonance. Hard excitations produce actuation forces large enough to produce resonance away from the primary resonance zone. There is no DC component in the voltage applied. The partial differential equation of motion describing the behavior of the system is solved using two modes of vibration reduced order model (ROM). This model is solved through a continuation and bifurcation analysis using the software package AUTO 07P which produces the voltage-amplitude response (bifurcation diagram of the system, and a numerical integration of the system of differential equations using Matlab that produces time responses of the system. Numerical simulations are conducted for a typical MEMS silicon circular plate resonator. For this resonator the quantum dynamics effects such as Casimir effect or Van der Waals effect are negligible. Both methods show agreement for the entire range of voltage values and amplitudes. The response consists of an increase of the amplitude with the increase of voltage, except around the value of 4 of the dimensionless voltage where the resonance shows two saddle-node bifurcations and a peak amplitude about ten times larger than the amplitudes before and after the dimensionless voltage of 4. The softening effect is present. The pull-in voltage is reached at large values of the dimensionless voltage, namely about 14. The effects of damping and frequency on the voltage response are reported. As the damping increases, the peak amplitude decreases for the resonance. However, the pull-in voltage is not affected. As the frequency increases, the resonance zone is shifted to lower voltage values and lower peak amplitudes. However, the pull-in voltage and the behavior for large voltage values are not affected.

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