Thin film deposition of barium strontium oxide by rf magnetron sputtering

2006 ◽  
Vol 24 (6) ◽  
pp. 2187-2191 ◽  
Author(s):  
Yan Liu ◽  
Christopher M. Day ◽  
Scott A. Little ◽  
Feng Jin
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Strontium Oxide ◽  
Barium Strontium

LiFePO4 thin film deposition onto Ag coated glass by RF magnetron sputtering

2018 ◽  
Vol 5 (11) ◽  
pp. 116401
Author(s):  
Suat Pat ◽  
H HakanYudar ◽  
Şadan Korkmaz ◽  
Soner Özen ◽  
Zerrin Pat
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Coated Glass

Cubic BN thin film deposition by a RF magnetron sputtering

Vacuum ◽  
2018 ◽  
Vol 157 ◽  
pp. 31-35 ◽  
Author(s):  
Suat Pat ◽  
Erbil Şilik ◽  
Caner Musaoğlu ◽  
Soner Özen ◽  
Reza Mohammadigharehbagh ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Thin Film Deposition ◽  
Film Deposition

Optimal target sputtering mode for aluminum nitride thin film deposition by high power pulsed magnetron sputtering

Vacuum ◽  
2019 ◽  
Vol 160 ◽  
pp. 410-417 ◽  
Author(s):  
D.L. Ma ◽  
H.Y. Liu ◽  
Q.Y. Deng ◽  
W.M. Yang ◽  
K. Silins ◽  
...  
Keyword(s):  
Thin Film ◽  
Aluminum Nitride ◽  
Magnetron Sputtering ◽  
High Power ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Optimal Target ◽  
Pulsed Magnetron

Thin film deposition by magnetron sputtering and determination of some physical parameters

1989 ◽  
Vol 176 (2) ◽  
pp. 219-226 ◽  
Author(s):  
M.M.D. Ramos ◽  
J.B. Almeida ◽  
M.I.C. Ferreira ◽  
M.P. Dos Santos
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Physical Parameters
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