scholarly journals Thin electron beam defined hydrogen silsesquioxane spacers for vertical nanowire transistors

Author(s):  
Elvedin Memišević ◽  
Erik Lind ◽  
Lars-Erik Wernersson
Nano Letters ◽  
2013 ◽  
Vol 14 (1) ◽  
pp. 94-100 ◽  
Author(s):  
Damon J. Carrad ◽  
Adam M. Burke ◽  
Roman W. Lyttleton ◽  
Hannah J. Joyce ◽  
Hark Hoe Tan ◽  
...  

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