Characterization of Ru thin films from a novel CVD/atomic layer deposition precursor “Rudense” for capping layer of Cu interconnects

2015 ◽  
Vol 33 (1) ◽  
pp. 01A133 ◽  
Author(s):  
Atsushi Maniwa ◽  
Hirokazu Chiba ◽  
Kazuhisa Kawano ◽  
Naoyuki Koiso ◽  
Hiroyuki Oike ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Capping Layer ◽  
Cu Interconnects ◽  
Layer Deposition

Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxide Thin Films

2010 ◽  
Vol 157 (10) ◽  
pp. G193 ◽  
Author(s):  
Aile Tamm ◽  
Marianna Kemell ◽  
Jekaterina Kozlova ◽  
Timo Sajavaara ◽  
Massimo Tallarida ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Luminescent properties of europium titanium phosphate thin films deposited by atomic layer deposition

RSC Advances ◽  
2017 ◽  
Vol 7 (13) ◽  
pp. 8051-8059 ◽  
Author(s):  
Michael N. Getz ◽  
Per-Anders Hansen ◽  
Helmer Fjellvåg ◽  
Ola Nilsen
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Structural Characterization ◽  
Atomic Layer ◽  
Luminescent Properties ◽  
Titanium Phosphate ◽  
The Novel ◽  
Layer Deposition ◽  
Novel Material

Optical and structural characterization of luminescent thin films of the novel material europium titanium phosphate, deposited by atomic layer deposition.

Atomic layer deposition and characterization of Ga-doped ZnO thin films

2007 ◽  
Vol 42 (1-6) ◽  
pp. 172-175 ◽  
Author(s):  
K. Saito ◽  
Y. Hiratsuka ◽  
A. Omata ◽  
H. Makino ◽  
S. Kishimoto ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Layer Deposition ◽  
Doped Zno

Atomic layer deposition and characterization of biocompatible hydroxyapatite thin films

2009 ◽  
Vol 517 (20) ◽  
pp. 5819-5824 ◽  
Author(s):  
Matti Putkonen ◽  
Timo Sajavaara ◽  
Paavo Rahkila ◽  
Leiting Xu ◽  
Sulin Cheng ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition
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