MoS2 thin films from a (NtBu)2(NMe2)2Mo and 1-propanethiol atomic layer deposition process
2019 ◽
Vol 37
(1)
◽
pp. 010901
◽
Berc Kalanyan
◽
Ryan Beams
◽
Michael B. Katz
◽
Albert V. Davydov
◽
James E. Maslar
◽
...
2019 ◽
Vol 217
(8)
◽
pp. 1900237
Zhen Zhu
◽
Saoussen Merdes
◽
Oili M. E. Ylivaara
◽
Kenichiro Mizohata
◽
Mikko J. Heikkilä
◽
...
Jin-Hyeok Lee
◽
Romel Hidayat
◽
Rahul Ramesh
◽
Hyeonsu Roh
◽
Dip K. Nandi
◽
...
2019 ◽
Vol 16
(4)
◽
pp. 227-236
◽
Moonkyun Song
◽
Shiwoo Rhee
2008 ◽
Vol 47
(13)
◽
pp. C271
◽
Tero Pilvi
◽
Mikko Ritala
◽
Markku Leskelä
◽
Martin Bischoff
◽
Ute Kaiser
◽
...
2013 ◽
Vol 102
(13)
◽
pp. 131603
◽
G. Seguini
◽
E. Cianci
◽
C. Wiemer
◽
D. Saynova
◽
J. A. M. van Roosmalen
◽
...
Tero Pilvi
◽
Mikko Ritala
◽
Markku Leskelä
◽
Martin Bischoff
◽
Norbert Kaiser
1997 ◽
Vol 181
(3)
◽
pp. 259-264
◽
Jaan Aarik
◽
Aleks Aidla
◽
Väino Sammelselg
◽
Teet Uustare
2002 ◽
Vol 408
(1-2)
◽
pp. 97-103
◽
Jaan Aarik
◽
Aleks Aidla
◽
Hugo Mändar
◽
Teet Uustare
◽
Väino Sammelselg