Measurements of electron temperature in a capacitively coupled plasma using emission spectroscopy

1988 ◽  
Vol 6 (3) ◽  
pp. 2051-2053 ◽  
Author(s):  
J. Felts ◽  
E. Lopata
Keyword(s):  
Electron Temperature ◽  
Emission Spectroscopy ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

CHF 3 Dual-Frequency Capacitively Coupled Plasma by Optical Emission Spectroscopy

2008 ◽  
Vol 25 (8) ◽  
pp. 2942-2945 ◽  
Author(s):  
Xu Yi-Jun ◽  
Ye Chao ◽  
Huang Xiao-Jiang ◽  
Yuan Jing ◽  
Xing Zhen-Yu ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasma

2013 ◽  
Vol 62 (20) ◽  
pp. 205208
Author(s):  
Du Yong-Quan ◽  
Liu Wen-Yao ◽  
Zhu Ai-Min ◽  
Li Xiao-Song ◽  
Zhao Tian-Liang ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

2000 ◽  
Vol 77 (4) ◽  
pp. 489-491 ◽  
Author(s):  
T. Kitajima ◽  
Y. Takeo ◽  
Z. Lj. Petrović ◽  
T. Makabe
Keyword(s):  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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