Electrical conductivity of as‐prepared and annealed amorphous hydrogenated carbon films

1990 ◽  
Vol 8 (3) ◽  
pp. 1509-1513 ◽  
Author(s):  
A. Reyes‐Mena ◽  
J. González‐Hernández ◽  
R. Asomoza ◽  
B. S. Chao
Keyword(s):  
Electrical Conductivity ◽  
Carbon Films ◽  
Amorphous Hydrogenated Carbon

The Graphitization of Amorphous Hydrogenated Carbon Films During Thermal Annealing

1989 ◽  
Vol 164 ◽  
Author(s):  
Sam Shuhan Lin ◽  
Shuguang Chen ◽  
Dang Mo
Keyword(s):  
Electrical Conductivity ◽  
Raman Spectroscopy ◽  
Electrical Properties ◽  
Thermal Annealing ◽  
Spectroscopic Ellipsometry ◽  
Carbon Films ◽  
Infrared And Raman Spectra ◽  
Optical And Electrical Properties ◽  
Infrared And Raman Spectroscopy ◽  
Amorphous Hydrogenated Carbon

AbstractEffects of thermal annealing on the properties of amorphous hydrogenated carbon films have been studied with spectroscopic ellipsometry, electrical conductivity, and infrared and Raman spectroscopy. The results show that not only the optical and electrical properties, but also the infrared and Raman spectra, change significantly after annealing above 400°C. We suggest that thermal annealing makes amorphous hydrogenated carbon films more graphite-like, and the observed changes in the microstructure cause the changes in the optical and electrical properties.

scholarly journals Characterization of amorphous hydrogenated carbon films deposited by MFPUMST at different ratios of mixed gases

2012 ◽  
Vol 35 (7) ◽  
pp. 1087-1091
Author(s):  
HAIYANG DAI ◽  
CHANGYONG ZHAN ◽  
HUI JIANG ◽  
NINGKANG HUANG
Keyword(s):  
Carbon Films ◽  
Mixed Gases ◽  
Amorphous Hydrogenated Carbon

Electrical conductivity of amorphous hydrogenated carbon

1995 ◽  
Vol 72 (3) ◽  
pp. 335-350 ◽  
Author(s):  
A. Helmbold ◽  
P. Hammer ◽  
J. U. Thiele ◽  
K. Rohwer ◽  
D. Meissner
Keyword(s):  
Electrical Conductivity ◽  
Amorphous Hydrogenated Carbon

Electrical conductivity of nitride carbon films with different nitrogen content

2003 ◽  
Vol 126 (3) ◽  
pp. 163-166 ◽  
Author(s):  
Weili Zhang ◽  
Yiben Xia ◽  
Jianhua Ju ◽  
Linjun Wang ◽  
Zhijun Fang ◽  
...  
Keyword(s):  
Electrical Conductivity ◽  
Nitrogen Content ◽  
Carbon Films

Optical properties of amorphous hydrogenated carbon films: A spectroscopic ellipsometry study

1987 ◽  
Vol 2 (5) ◽  
pp. 645-647 ◽  
Author(s):  
Shuhan Lin ◽  
Shuguang Chen
Keyword(s):  
Optical Properties ◽  
Spectroscopic Ellipsometry ◽  
Carbon Films ◽  
Index Of Refraction ◽  
The Real ◽  
Complex Index ◽  
Tentative Explanation ◽  
Amorphous Hydrogenated Carbon ◽  
Ellipsometry Data ◽  
Complex Index Of Refraction

Optical properties of plasma-deposited amorphous hydrogenated carbon films were studied by spectroscopic ellipsometry. From the ellipsometry data, the real and imaginary parts, n and k, of the complex index of refraction of the film have been deduced for photon energies between 2.0 and 4.0 eV for as-grown as well as for thermally annealed films. Here n and k showed considerable variation with subsequent annealing, even under 400°C. A tentative explanation of the results is proposed.

scholarly journals Reactivity of soft amorphous hydrogenated carbon films in ambient atmosphere

2007 ◽  
Vol 363-365 ◽  
pp. 944-948 ◽  
Author(s):  
E. Salançon ◽  
T. Dürbeck ◽  
T. Schwarz-Selinger ◽  
W. Jacob
Keyword(s):  
Carbon Films ◽  
Ambient Atmosphere ◽  
Amorphous Hydrogenated Carbon

Selective deposition of amorphous hydrogenated carbon films used as masks for reactive ion etching of Si using CF4

Vacuum ◽  
1999 ◽  
Vol 52 (3) ◽  
pp. 313-314 ◽  
Author(s):  
Marco AR Alves ◽  
Olga Balachova ◽  
Edmundo da Silva Braga ◽  
Lucila Cescato
Keyword(s):  
Reactive Ion Etching ◽  
Carbon Films ◽  
Selective Deposition ◽  
Ion Etching ◽  
Amorphous Hydrogenated Carbon
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