Control of radio‐frequency‐plasma process to improve the reproducibility of silicon oxynitride thin film preparation

1995 ◽  
Vol 13 (4) ◽  
pp. 2099-2104 ◽  
Author(s):  
D. M. Diatezua ◽  
P. A. Thiry ◽  
R. Caudano
Keyword(s):  
Thin Film ◽  
Radio Frequency ◽  
Silicon Oxynitride ◽  
Radio Frequency Plasma ◽  
Plasma Process ◽  
Frequency Plasma ◽  
Thin Film Preparation ◽  
Film Preparation

Growth and Characterization of AlBN Polycrystalline Thin Film by Radio-Frequency Plasma-Assisted Molecular Beam Epitaxy

2006 ◽  
Vol 301 ◽  
pp. 95-98 ◽  
Author(s):  
Masashi Yamashita ◽  
Yukari Ishikawa ◽  
Hitoshi Ohsato ◽  
Noriyoshi Shibata
Keyword(s):  
Thin Film ◽  
Molecular Beam Epitaxy ◽  
Radio Frequency ◽  
Photoelectron Spectroscopy ◽  
Molecular Beam ◽  
High Energy ◽  
Radio Frequency Plasma ◽  
Group Iii ◽  
Frequency Plasma

An AlBN thin film with a boron content (B/(Al+B)) of 0.1 or 0.3 was obtained by radio-frequency plasma-assisted molecular beam epitaxy (RF-MBE) using EB-guns as group-III element sources and an RF radical source for nitrogen supply. We compared the characteristics of the film with those of AlN and BN films. By reflective high-energy electron diffraction (RHEED), we observed ring patterns in the AlBN film. The X-ray photoelectron spectroscopy (XPS) N1s peak of the AlBN film was observed at a binding energy between the peaks of AlN and BN. There was no evidence for phase separation in the film.

Improving the oxygen barrier properties of PET polymer by radio frequency plasma-polymerized SiOxNy thin film

2019 ◽  
Vol 358 ◽  
pp. 91-97 ◽  
Author(s):  
Marjan Shahpanah ◽  
Somayeh Mehrabian ◽  
Marzieh Abbasi-Firouzjah ◽  
Babak Shokri
Keyword(s):  
Thin Film ◽  
Radio Frequency ◽  
Barrier Properties ◽  
Radio Frequency Plasma ◽  
Oxygen Barrier ◽  
Frequency Plasma
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