Improving the oxygen barrier properties of PET polymer by radio frequency plasma-polymerized SiOxNy thin film

2019 ◽  
Vol 358 ◽  
pp. 91-97 ◽  
Author(s):  
Marjan Shahpanah ◽  
Somayeh Mehrabian ◽  
Marzieh Abbasi-Firouzjah ◽  
Babak Shokri
Keyword(s):  
Thin Film ◽  
Radio Frequency ◽  
Barrier Properties ◽  
Radio Frequency Plasma ◽  
Oxygen Barrier ◽  
Frequency Plasma

Growth and Characterization of AlBN Polycrystalline Thin Film by Radio-Frequency Plasma-Assisted Molecular Beam Epitaxy

2006 ◽  
Vol 301 ◽  
pp. 95-98 ◽  
Author(s):  
Masashi Yamashita ◽  
Yukari Ishikawa ◽  
Hitoshi Ohsato ◽  
Noriyoshi Shibata
Keyword(s):  
Thin Film ◽  
Molecular Beam Epitaxy ◽  
Radio Frequency ◽  
Photoelectron Spectroscopy ◽  
Molecular Beam ◽  
High Energy ◽  
Radio Frequency Plasma ◽  
Group Iii ◽  
Frequency Plasma

An AlBN thin film with a boron content (B/(Al+B)) of 0.1 or 0.3 was obtained by radio-frequency plasma-assisted molecular beam epitaxy (RF-MBE) using EB-guns as group-III element sources and an RF radical source for nitrogen supply. We compared the characteristics of the film with those of AlN and BN films. By reflective high-energy electron diffraction (RHEED), we observed ring patterns in the AlBN film. The X-ray photoelectron spectroscopy (XPS) N1s peak of the AlBN film was observed at a binding energy between the peaks of AlN and BN. There was no evidence for phase separation in the film.

Field emission from thin film diamond grown using a magnetically enhanced radio frequency plasma source

1999 ◽  
Vol 17 (2) ◽  
pp. 719 ◽  
Author(s):  
Simon S. Proffitt ◽  
Simon J. Probert ◽  
Michael D. Whitfield ◽  
John S. Foord ◽  
Richard B. Jackman
Keyword(s):  
Thin Film ◽  
Radio Frequency ◽  
Field Emission ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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