Equivalent circuit of radio frequency-plasma with the transformer model
2014 ◽
Vol 85
(2)
◽
pp. 02B117
◽
Keyword(s):
2000 ◽
Vol 39
(Part 1, No. 10)
◽
pp. 5947-5952
1998 ◽
Vol 16
(4)
◽
pp. 2162-2172
◽
2021 ◽
Vol 1923
(1)
◽
pp. 012020
2013 ◽
Vol 84
(6)
◽
pp. 063904
◽
Keyword(s):
1994 ◽
Vol 138
(1-4)
◽
pp. 443-447
◽
Keyword(s):
2011 ◽
Vol 20
(3)
◽
pp. 034020
◽
1992 ◽
Vol 10
(4)
◽
pp. 1723-1727
◽
Keyword(s):