A self-aligned cobalt silicide technology using rapid thermal processing
1986 ◽
Vol 4
(6)
◽
pp. 1358
◽
1998 ◽
Vol 37
(Part 2, No. 10B)
◽
pp. L1221-L1223
Keyword(s):
1997 ◽
Vol 15
(4)
◽
pp. 899
◽
2011 ◽
Vol 131
(2)
◽
pp. 159-165
◽
2019 ◽
Vol 8
(1)
◽
pp. P35-P40
◽
Keyword(s):
1994 ◽
Vol 141
(11)
◽
pp. 3200-3209
◽
1990 ◽
Vol 29
(Part 2, No. 1)
◽
pp. L137-L140
◽
Keyword(s):