Silicon structures for in situ characterization of atomic force microscope probe geometry
1996 ◽
Vol 14
(6)
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pp. 3425
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2021 ◽
Vol 2086
(1)
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pp. 012205
2015 ◽
Vol 6
(3)
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pp. 179-191
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2008 ◽
Vol 79
(7)
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pp. 073106
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2007 ◽
Vol 33
(10)
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pp. 889-892
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2010 ◽
Vol 4
(2/3/4)
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pp. 160
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2011 ◽
Vol 111
(8)
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pp. 1388-1394
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