The wear analysis of chisel-edge ruling tool for diffraction gratings is very complex because of following two reasons that one is the wear distribution on edge after grating ruling is too minute so that hard to find and measured by conventional equipment like microscope, and the other is the effect of wear on the groove depth, pitch, ridge, blaze angle, non-blaze angle, groove bottom angle and diffraction efficiency of gratings. In order to determine what extent of wear is can be ignored, this paper had go on brief approximate test study on wear analysis of chisel-edge ruling tool for diffraction gratings which ruling echelle gratings groove density of 79 gr/mm, and analyzed the variation of groove depth, pitch, ridge, blaze angle, non-blaze angle, groove bottom angle and diffraction efficiency along with ruling distance, and found the microscale tool wear on chisel-edge ruling tool, finally determined this extent of tool wear cannot effect ruling echelle gratings groove density of 79 gr/mm .
The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray
