Characterization of tungsten silicide (WSix) film grown by chemical vapor deposition (CVD)

1999 ◽  
Author(s):  
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Satheesh Ambadi ◽  
Richard Winer ◽  
Ken Kitt ◽  
Carlos Garcia ◽  
...  
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Xingmin Cai ◽  
Xiaoqiang Su ◽  
Fan Ye ◽  
Huan Wang ◽  
Guangxing Liang ◽  
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2020 ◽  
Vol 13 (7) ◽  
pp. 075505
Author(s):  
Tomohiro Yamaguchi ◽  
Hiroki Nagai ◽  
Takanori Kiguchi ◽  
Nao Wakabayashi ◽  
Takuto Igawa ◽  
...  

Author(s):  
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...  

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