High-performance polysilicon air-gap thin film transistor on low-temperature substrates

Mapping Intimacies ◽

10.1117/12.498860 ◽

2003 ◽

Author(s):

Hicham Mahfoz-Kotb ◽

Anne-Claire Salaun ◽

Tayeb Mohammed-Brahim ◽

Nathalie Coulon ◽

Olivier Bonnaud ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

High Performance ◽

Thin Film Transistor ◽

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Flexible and High-Performance Amorphous Indium Zinc Oxide Thin-Film Transistor Using Low-Temperature Atomic Layer Deposition

ACS Applied Materials & Interfaces ◽

10.1021/acsami.6b11774 ◽

2016 ◽

Vol 8 (49) ◽

pp. 33821-33828 ◽

Author(s):

Jiazhen Sheng ◽

Hwan-Jae Lee ◽

Saeroonter Oh ◽

Jin-Seong Park

Keyword(s):

Thin Film ◽

Low Temperature ◽

High Performance ◽

Thin Film Transistor ◽

Atomic Layer ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Indium Zinc Oxide ◽

Layer Deposition

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All Solution Processed High Performance In-Ga-Zn-O Thin Film Transistor Fabricated at Low Temperature using Microwave irradiation

10.7567/ssdm.2014.e-7-3 ◽

2014 ◽

Author(s):

K.W. Jo ◽

W.J. Cho

Keyword(s):

Thin Film ◽

Low Temperature ◽

Microwave Irradiation ◽

High Performance ◽

Thin Film Transistor ◽

Solution Processed

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High performance low temperature polysilicon thin film transistor using ECR plasma thermal oxide as gate insulator

IEEE Electron Device Letters ◽

10.1109/55.296223 ◽

1994 ◽

Vol 15 (8) ◽

pp. 301-303 ◽

Author(s):

Jung-Yeal Lee ◽

Chul-Hi Han ◽

Choong-Ki Kim

Keyword(s):

Thin Film ◽

Low Temperature ◽

High Performance ◽

Thin Film Transistor ◽

Gate Insulator ◽

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High Performance p-type SnO thin-film Transistor with SiOxGate Insulator Deposited by Low-Temperature PECVD Method

JSTS Journal of Semiconductor Technology and Science ◽

10.5573/jsts.2014.14.5.666 ◽

2014 ◽

Vol 14 (5) ◽

pp. 666-672 ◽

Author(s):

Myeonghun U ◽

Young-Joon Han ◽

Sang-Hun Song ◽

In-Tak Cho ◽

Jong-Ho Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

High Performance ◽

Thin Film Transistor ◽

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35-1:Invited Paper: Advanced Technologies Based on a-Si or LTPS (Low Temperature Poly Si) TFT (Thin Film Transistor) for High Performance Mobile Display

SID Symposium Digest of Technical Papers ◽

10.1889/1.2785541 ◽

2007 ◽

Vol 38 (1) ◽

pp. 1262-1265 ◽

Author(s):

Myung-Koo Kang ◽

Keehan Uh ◽

HyungGuel Kim

Keyword(s):

Thin Film ◽

Low Temperature ◽

High Performance ◽

Thin Film Transistor ◽

Advanced Technologies

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Li-Assisted Low-Temperature Phase Transitions in Solution-Processed Indium Oxide Films for High-Performance Thin Film Transistor

Scientific Reports ◽

10.1038/srep25079 ◽

2016 ◽

Vol 6 (1) ◽

Author(s):

Manh-Cuong Nguyen ◽

Mi Jang ◽

Dong-Hwi Lee ◽

Hyun-Jun Bang ◽

Minjung Lee ◽

...

Keyword(s):

Thin Film ◽

Phase Transitions ◽

Low Temperature ◽

Indium Oxide ◽

High Performance ◽

Thin Film Transistor ◽

Oxide Films ◽

Temperature Phase ◽

Solution Processed ◽

Low Temperature Phase

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Low-temperature and high-performance ZnSnO thin film transistor activated by lightwave irradiation

Ceramics International ◽

10.1016/j.ceramint.2021.04.050 ◽

2021 ◽

Author(s):

Qian Zhang ◽

Cheng Ruan ◽

Hongyu Gong ◽

Guodong Xia ◽

Sumei Wang

Keyword(s):

Thin Film ◽

Low Temperature ◽

High Performance ◽

Thin Film Transistor

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Low-temperature fabrication of Sr–N co-doped In2O3 thin film by aqueous route and its application to high performance InSrNO thin film transistor

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/ab32ae ◽

2019 ◽

Vol 52 (43) ◽

pp. 435101 ◽

Author(s):

Youhang Zhou ◽

Jun Li ◽

Yaohua Yang ◽

Qi Chen ◽

Xifeng Li ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

High Performance ◽

Thin Film Transistor ◽

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High-performance polycrystalline silicon thin-film transistor technology using low-temperature metal-induced unilateral crystallization

Microelectronics Journal ◽

10.1016/s0026-2692(03)00241-6 ◽

2004 ◽

Vol 35 (4) ◽

pp. 337-341 ◽

Author(s):

Man Wong ◽

Hoi S. Kwok

Keyword(s):

Thin Film ◽

Low Temperature ◽

Polycrystalline Silicon ◽

High Performance ◽

Thin Film Transistor ◽

Silicon Thin Film

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High performance thin film transistor with low temperature atomic layer deposition nitrogen-doped ZnO

Applied Physics Letters ◽

10.1063/1.2803219 ◽

2007 ◽

Vol 91 (18) ◽

pp. 183517 ◽

Author(s):

S. J. Lim ◽

Soon-ju Kwon ◽

Hyungjun Kim ◽

Jin-Seong Park

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

High Performance ◽

Thin Film Transistor ◽

Atomic Layer ◽

Nitrogen Doped ◽

Layer Deposition ◽

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