Modeling of photochemical vapor deposition of epitaxial silicon using an ArF excimer laser
Keyword(s):
1992 ◽
Vol 139
(8)
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pp. 2314-2318
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Keyword(s):
1997 ◽
Vol 15
(5)
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pp. 2492-2501
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1989 ◽
Vol 7
(3)
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pp. 429
◽
1997 ◽
Vol 36
(Part 2, No. 2A)
◽
pp. L150-L153
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