Line edge roughness transfer during plasma etching: modeling approaches and comparison with experimental results
Keyword(s):
2009 ◽
Vol 8
(4)
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pp. 043004
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Keyword(s):
2004 ◽
Vol 73-74
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pp. 265-270
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2013 ◽
Vol 60
(11)
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pp. 3676-3682
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Keyword(s):
2009 ◽
Vol 86
(4-6)
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pp. 968-970
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2009 ◽
Vol 37
(9)
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pp. 1705-1714
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Keyword(s):
2008 ◽
Vol 47
(4)
◽
pp. 2501-2505
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Study of the acid-diffusion effect on line edge roughness using the edge roughness evaluation method
2002 ◽
Vol 20
(4)
◽
pp. 1342
◽
Keyword(s):
On Line
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