The Chemi-ionization Rate Constant of Metastable Neon Atoms in a Glow Discharge at Cryogenic Temperature

2021 ◽  
Vol 15 (4) ◽  
pp. 691-695
Author(s):  
V. V. Shumova ◽  
D. N. Polyakov ◽  
L. M. Vasilyak
1992 ◽  
Vol 7 (8) ◽  
pp. 2160-2181 ◽  
Author(s):  
Dariusz Orlicki ◽  
Vladimir Hlavacek ◽  
Hendrik J. Viljoen

PECVD reactors are increasingly used for the manufacturing of electronic components. This paper presents a reactor model for the deposition of amorphous hydrogenated silicon in a dc glow discharge of Ar–SiH4 The parallel-plate configuration is used in this study. Electron and positive ion densities have been calculated in a self-consistent way. A macroscopic description that is based on the Boltzmann equation with forwardscattering is used to calculate the ionization rate. The dissociation rate constant of SiH4 requires knowledge about the electron energy distribution function. Maxwell and Druyvesteyn distributions are compared and the numerical results show that the deposition rate is lower for the Druyvesteyn distribution. The plasma chemistry model includes silane, silyl, silylene, disilane, hydrogen, and atomic hydrogen. The sensitivity of the deposition rate toward the branching ratios SiH3 and SiH2 as well as H2 and H during silyl dissociation is examined. Further parameters that are considered in the sensitivity analysis include anode/cathode temperatures, pressure, applied voltage, gap distance, gap length, molar fraction of SiH4, and flow speed. This work offers insight into the effects of all design and control variables.


2018 ◽  
Vol 33 (1) ◽  
pp. 22-27
Author(s):  
D.N. Polyakov ◽  
◽  
V.V. Shumova ◽  
L.M. Vasilyak ◽  
◽  
...  

2019 ◽  
Vol 22 (3) ◽  
pp. 034003
Author(s):  
Yonggan LIANG ◽  
Jian WU ◽  
Hui LI ◽  
Ruihuan TIAN ◽  
Chengxun YUAN ◽  
...  

Author(s):  
Benjamin J McCall

plays a key role in interstellar chemistry as the initiator of ion–molecule chemistry. The amount of observed in dense interstellar clouds is consistent with expectations, but the large abundance of seen in diffuse clouds is not easily explained by simple chemical models. A crucial parameter in predicting the abundance of in diffuse clouds is the rate constant for dissociative recombination (DR) with electrons. The value of this constant has been very controversial, because different experimental techniques have yielded very different results, perhaps owing to varying degrees of rotational and vibrational excitation of the ions. If the value of this rate constant under interstellar conditions were much lower than usually assumed, the large abundance could be easily explained. In an attempt to pin down this crucial rate constant, we have performed DR measurements at the CRYRING ion storage ring in Stockholm, using a supersonic expansion ion source to produce rotationally cold ions. These measurements suggest that the DR rate constant in diffuse clouds is not much lower than usually assumed and that the abundant must be due to either a low electron fraction or a high ionization rate.


Author(s):  
Shiro Fujishiro

The Ti-6 wt.% Al-4 wt.% V commercial alloys have exhibited an improved formability at cryogenic temperature when the alloys were heat-treated prior to the tests. The author was interested in further investigating this unusual ductile behavior which may be associated with the strain-induced transformation or twinning of the a phase, enhanced at lower temperatures. The starting materials, supplied by RMI Co., Niles, Ohio were rolled mill products in the form of 40 mil sheets. The microstructure of the as-received materials contained mainly ellipsoidal α grains measuring between 1 and 5μ. The β phase formed an undefined grain boundary around the a grains. The specimens were homogenized at 1050°C for one hour, followed by aging at 500°C for two hours, and then quenched in water to produce the α/β mixed microstructure.


2001 ◽  
Vol 11 (PR3) ◽  
pp. Pr3-357-Pr3-362 ◽  
Author(s):  
D. D. Papakonstantinou ◽  
D. Mataras ◽  
Arefi-Khonsari

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