Experimental Study of a Plasma Produced by a Helical Radio-frequency Structure
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A plasma produced by a helical RF structure of the Lisitano type is investigated. Measurements of electron density, electron temperature, and plasma stability are reported as a function of RF frequency and power, magnetic field strength and geometry, and neutral argon pressure. It is concluded that at moderate power (~20 W), electron cyclotron resonance is important in the power absorption process.
2009 ◽
Vol 600
(3)
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pp. 525-533
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2002 ◽
Vol 41
(Part 1, No. 6A)
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pp. 3926-3929
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1986 ◽
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pp. 400-402
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2019 ◽
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1994 ◽
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2001 ◽
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pp. 2489-2494
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2021 ◽
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pp. 108811
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