Nickel-Indiffusion Waveguide for TE-TM Mode Splitter in Lithium Niobate

1997 ◽  
Vol 08 (04) ◽  
pp. 621-642 ◽  
Author(s):  
Way-Seen Wang ◽  
Yu-Pin Liao ◽  
Chih-Hua Yang
Keyword(s):  
Lithium Niobate ◽  
Optical Waveguides ◽  
Propagation Loss ◽  
Dispersion Process ◽  
Tm Mode ◽  
Electro Optic ◽  
Dependent Polarization ◽  
First Time ◽  
Mode Splitter ◽  
Versus Concentration

Optical waveguides fabricated by nickel indiffusion on lithium niobate are reviewed. In particular, the fabrication process, index change versus concentration, wavelength dispersion, process-dependent polarization, propagation loss, and electro-optic modulation of the nickel indiffusion waveguide are discussed. To improve the confinement of single-ordinary polarization waveguide fabricated by nickel indiffusion, a novel waveguide made by zinc and nickel indiffusion is presented for the first time. Though the measured propagation loss of the waveguide is larger, the measured output power contours are found more symmetric. Moreover, several TE-TM mode splitters using one or more nickel indiffusion waveguides for the complete mode sorting effect are discussed.

Integrated (Pb,La)(Zr,Ti)O3 Heterostructure Waveguide Devices Fabricated by Solid-Phase Epitaxy

1999 ◽  
Vol 597 ◽  
Author(s):  
K. Nashimoto ◽  
S. Nakamura ◽  
H. Moriyama ◽  
K. Haga ◽  
M. Watanabe ◽  
...  
Keyword(s):  
Low Voltage ◽  
Solid Phase ◽  
Wet Etching ◽  
Propagation Loss ◽  
Beam Deflection ◽  
Solid Phase Epitaxy ◽  
Te Mode ◽  
Tm Mode ◽  
Electro Optic ◽  
Channel Waveguides

AbstractHeterostructures of a Pb(Zr,Ti)O3 (PZT) waveguide/(Pb,La)(Zr,Ti)O3 (PLZT) system buffer layer were grown on a Nb-doped SrTiO3 (Nb:ST) substrate by solid-phase epitaxy. The propagation loss in the PLZT heterostructure waveguides was on the order of I dB/cm. An electro-optic beam deflection device with an ITO prism electrode on the surface of the PLZT heterostructure waveguide presented efficient deflection of the coupled laser beam by applying a voltage between the electrode and the substrate. A beam deflection greater than 10 mrad at 5 V and frequency response as fast as 13 MHz were observed. An apparent electro-optic coefficient as large as 39 pmJV was estimated from the deflection characteristics for the TE mode and TM mode suggesting the polarization independent nature of the PZT waveguide. For integrating the electrooptic PLZT heterostructure waveguides, channel waveguides were fabricated in the PZT waveguides using a simple wet-etching process. Based on a low-voltage drive structure, lowloss waveguide process, and fine patterning process, a fabricated digital matrix switch showed a – 10 dB cross-talk at a voltage as low as 7.5 V.

Laser-Assisted Etching of Lithium Niobate

1988 ◽  
Vol 126 ◽  
Author(s):  
Glennis J. Orloff ◽  
Steven L. Bernasek ◽  
Gary L. Wolk ◽  
R. J. Coyle
Keyword(s):  
Experimental Data ◽  
Chemical Analysis ◽  
Lithium Niobate ◽  
Rate Equation ◽  
Electron Spectroscopy ◽  
Optical Waveguides ◽  
Etch Rate ◽  
Auger Electron ◽  
Important Process ◽  
Electro Optic

ABSTRACTLaser-assisted dry etching of lithium niobate, LiNbO3, as well as other electro-optic materials could be an industrially important process in the fabrication of optical waveguides. In this investigation, an excimer laser (ArF; 193nm) was used to conduct etching reactions using nitrogen trifluoride, NF3. Enhancement of etching was observed by comparing the etch rate for a gas assisted process with that of a purely photoablative process. Chemical analysis of the etched features via Auger electron spectroscopy and correlation of a simple rate equation with the experimental data revealed that lasersurface interactions are responsible for the laser-assisted etching process.

Epitaxially induced secondary grain growth in Ti:LiNbO3 optical waveguides

1989 ◽  
Vol 47 ◽  
pp. 424-425
Author(s):  
M. A. McCoy
Keyword(s):  
Electron Microscopy ◽  
Solid Solution ◽  
Transmission Electron Microscopy ◽  
Refractive Index ◽  
Lithium Niobate ◽  
Grain Growth ◽  
Optical Waveguides ◽  
Waveguide Devices ◽  
Transmission Electron ◽  
Electro Optic

Lithium niobate (LiNbO3) is one of the most promising materials for use in hybrid optical waveguide devices because of its high electro-optic coefficient and its availability as large single crystals. Optical waveguides in LiNbO3 are most commonly made by Ti indiffusion in which strips of Ti metal (between 10 and 100 nm thick) are deposited on a single crystal LiNbO3 substrate. The device is then heated to temperatures around 1000°C typically for 6 hours. During this time, the Ti diffuses into the LiNbO3 to form a Ti-rich LiNbO3 solid solution. This solid solution has a higher refractive index than the substrate and forms the waveguide region. Factors controlling the indiffusion process, however, are not very well understood and very little is known about the microstructural changes which occur during Ti indiffusion. In this study, the microstructure of Ti:LiNbO3 optical waveguides was examined as a function of time and temperature using transmission electron microscopy (TEM).

A TE-TM mode splitter on lithium niobate using Ti, Ni, and MgO diffusions

1994 ◽  
Vol 6 (2) ◽  
pp. 245-248 ◽  
Author(s):  
Pei-Kuen Wei ◽  
Way-Seen Wang
Keyword(s):  
Lithium Niobate ◽  
Tm Mode ◽  
Mode Splitter

PZT Electro-Optic Waveguide Devices Fabricated by Solid-Phase Epitaxy

1997 ◽  
Vol 493 ◽  
Author(s):  
Keiichi Nashimoto ◽  
Shigetoshi Nakamura ◽  
Hiroaki Moriyama ◽  
Masao Watanabe ◽  
Eisuke Osakabe
Keyword(s):  
Optical Waveguides ◽  
Solid Phase ◽  
Solution Process ◽  
Propagation Loss ◽  
Metal Alkoxide ◽  
Solid Phase Epitaxy ◽  
Optical Propagation ◽  
Electro Optic ◽  
Pzt Thin Film ◽  
Conductive Substrate

ABSTRACTHigh quality epitaxial PZT optical waveguides have been grown by solid-phase epitaxy based on metal alkoxide solution process. Optical propagation loss was 4 dB/cm in epitaxial PZT thin film optical waveguides grown on SrTiO3 substrates. Epitaxial PZT optical waveguides were grown on Nb doped conductive SrTiO3 substrates, since considerable reduction in drive voltage will be expected when top electrode / optical waveguide / conductive substrate structures are realized. Propagation loss was relatively large, as compared with the structure using non-dope insulative substrates. Preliminary electrooptic deflection devices were fabricated by preparing prism electrodes on the surface of the PZT optical waveguides. Efficient deflection/switching of coupled laser beam in the PZT optical waveguides as large as 26 mrad was observed by applying 70 volts between prism electrode and Nb doped SrTiO3 substrates.

scholarly journals An Integrated Photonic Electric-Field Sensor Utilizing a 1 × 2 YBB Mach-Zehnder Interferometric Modulator with a Titanium-Diffused Lithium Niobate Waveguide and a Dipole Patch Antenna

Crystals ◽  
2019 ◽  
Vol 9 (9) ◽  
pp. 459 ◽  
Author(s):  
Jung
Keyword(s):  
Lithium Niobate ◽  
Electric Field ◽  
Optical Waveguides ◽  
Extinction Ratio ◽  
Rf Power ◽  
Applied Electric Field Strength ◽  
Electric Field Sensors ◽  
Electric Field Sensor ◽  
Electro Optic ◽  
Field Sensor

We studied photonic electric-field sensors using a 1 × 2 YBB-MZI modulator composed of two complementary outputs and a 3 dB directional coupler based on the electro-optic effect and titanium diffused lithium–niobate optical waveguides. The measured DC switching voltage and extinction ratio at the wavelength 1.3 μm were ~16.6 V and ~14.7 dB, respectively. The minimum detectable fields were ~1.12 V/m and ~3.3 V/m, corresponding to the ~22 dB and ~18 dB dynamic ranges of ~10 MHz and 50 MHz, respectively, for an rf power of 20 dBm. The sensor shows an almost linear response to the applied electric-field strength within the range of 0.29 V/m to 29.8 V/m.

scholarly journals High-Precision Propagation-Loss Measurement of Single-Mode Optical Waveguides on Lithium Niobate on Insulator

Micromachines ◽  
2019 ◽  
Vol 10 (9) ◽  
pp. 612 ◽  
Author(s):  
Jintian Lin ◽  
Junxia Zhou ◽  
Rongbo Wu ◽  
Min Wang ◽  
Zhiwei Fang ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
High Precision ◽  
Optical Waveguides ◽  
Single Mode ◽  
Propagation Loss ◽  
Field Size ◽  
High Precision Measurement ◽  
Mode Field ◽  
Optical Patterning ◽  
Measurement Approach

We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 µm mode field size (full-width at half-maximum). We developed a high-precision measurement approach by which single-mode waveguides were characterized to have propagation loss of ~0.042 dB/cm.

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