EFFECT OF SUBSTRATE TEMPERATURE ON THE GROWTH AND PROPERTIES OF ZnO:Al THIN FILMS

2012 ◽  
Vol 19 (02) ◽  
pp. 1250014 ◽  
Author(s):  
JINSONG LEI ◽  
YINSHENG ZOU

ZnO:Al (AZO) transparent conductive films used for solar cells were prepared by DC magnetron sputtering technology. The influence of substrate temperature on the electrical and optical properties of the films was studied. Further, the AZO films prepared were etched in diluted hydrochloric acid. The film surface morphology after etching for different time was researched.

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