Physical Properties of p-Type Tin Monoxide Films Deposited at Low Temperature by Radio Frequency Magnetron Sputtering

2011 ◽  
Vol 4 (7) ◽  
pp. 071101 ◽  
Author(s):  
Toshihiko Toyama ◽  
Yuichi Seo ◽  
Takafumi Konishi ◽  
Hiroaki Okamoto ◽  
Yasuo Tsutsumi
Keyword(s):  
Low Temperature ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Physical Properties ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
P Type ◽  
Tin Monoxide

Microstructural properties of phosphorus-doped p-type ZnO grown by radio-frequency magnetron sputtering

2008 ◽  
Vol 93 (11) ◽  
pp. 111905 ◽  
Author(s):  
Min-Suk Oh ◽  
Dae-Kue Hwang ◽  
Yong-Seok Choi ◽  
Jang-Won Kang ◽  
Seong-Ju Park ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Microstructural Properties ◽  
Radio Frequency Magnetron Sputtering ◽  
P Type ◽  
Phosphorus Doped

scholarly journals Arsenic doped p-type zinc oxide films grown by radio frequency magnetron sputtering

2009 ◽  
Vol 106 (7) ◽  
pp. 073709 ◽  
Author(s):  
J. C. Fan ◽  
C. Y. Zhu ◽  
S. Fung ◽  
Y. C. Zhong ◽  
K. S. Wong ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
P Type
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