Reactive Ion Beam Etching of Indium Phosphide in Electron Cyclotron Resonance Plasma Using Methane/Hydrogen/Nitrogen Mixtures

1994 ◽  
Vol 33 (Part 2, No. 3A) ◽  
pp. L390-L393 ◽  
Author(s):  
José Ramón Sendra ◽  
José Anguita
Keyword(s):  
Indium Phosphide ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Beam ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Ion Beam Etching ◽  
Resonance Plasma ◽  
Reactive Ion Beam Etching

Optimization of Electron Cyclotron Resonance Reactive Ion Beam Etching Reactors for Dry Etching of GaAs with Cl2

1997 ◽  
Vol 144 (9) ◽  
pp. 3191-3197 ◽  
Author(s):  
K. Nishioka ◽  
M. Sugiyama ◽  
M. Nezuka ◽  
Y Shimogaki ◽  
Y. Nakano ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Beam ◽  
Dry Etching ◽  
Electron Cyclotron ◽  
Ion Beam Etching ◽  
Reactive Ion Beam Etching

Electron Cyclotron Resonance-Reactive Ion Beam Etching of InP by Cyclic Injection of CH4/H2/Ar and O2

2002 ◽  
Vol 41 (Part 1, No. 1) ◽  
pp. 15-19 ◽  
Author(s):  
Tatsuya Suzuki ◽  
Nobuo Haneji ◽  
Kunio Tada ◽  
Yukihiro Shimogaki ◽  
Yoshiaki Nakano
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Beam ◽  
Electron Cyclotron ◽  
Ion Beam Etching ◽  
Cyclic Injection ◽  
Reactive Ion Beam Etching

Compact Electron Cyclotron Resonance Plasma Source Optimization for Ion Beam Applications

1997 ◽  
Vol 36 (Part 1, No. 7B) ◽  
pp. 4576-4582 ◽  
Author(s):  
Patrick O'Keeffe ◽  
Kouji Yamakawa ◽  
Harunobu Mutoh ◽  
Shoji Den ◽  
Yuzo Hayashi
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Beam ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

A simple kinetic model for the optimization of electron cyclotron resonance/reactive ion beam etching performance for GaAs

1995 ◽  
Vol 67 (7) ◽  
pp. 897-899 ◽  
Author(s):  
Masakazu Sugiyama ◽  
Takayuki Yamaizumi ◽  
Masahiro Nezuka ◽  
Yukihiro Shimogaki ◽  
Yoshiaki Nanako ◽  
...  
Keyword(s):  
Kinetic Model ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Beam ◽  
Electron Cyclotron ◽  
Ion Beam Etching ◽  
Simple Kinetic Model ◽  
Reactive Ion Beam Etching
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