A Mass Spectrometric Study of Reaction Mechanisms in Chemical Vapor Deposition of(Ba,Sr)TiO3Films

1997 ◽  
Vol 36 (Part 1, No. 4B) ◽  
pp. 2555-2560 ◽  
Author(s):  
Mikio Yamamuka ◽  
Takaaki Kawahara ◽  
Tsuyoshi Horikawa ◽  
Kouichi Ono
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Reaction Mechanisms ◽  
Chemical Vapor ◽  
Mass Spectrometric Study ◽  
Mass Spectrometric ◽  
Spectrometric Study

Visualization of Two-Dimensional Excitation Temperatures in CH4/N2/Ar Plasmas for Preparation of Carbonaceous Materials

2013 ◽  
Vol 135 (3) ◽  
Author(s):  
Qingchun Shen ◽  
Yasushi Miyata ◽  
Shigeaki Morita ◽  
Yoshinobu Baba ◽  
Kuniyuki Kitagawa ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Lithium Ion Batteries ◽  
Vapor Deposition ◽  
Reaction Mechanisms ◽  
Anode Materials ◽  
Lithium Ion ◽  
Chemical Vapor ◽  
Excitation Temperature ◽  
Two Dimensional ◽  
Carbonaceous Materials

Analysis of the two-dimensional (2D) distribution of excited Ar atoms has been made to synthesize better anode materials for lithium-ion batteries. The 2D visualization of excitation temperatures was based on the “two-line” method, which are important to diagnose the plasmas used for the preparation of carbonaceous materials by plasma enhanced chemical vapor deposition. The results showed that the excitation temperature in N2-rich (CH4-lean) plasma was lower than that in N2-lean (CH4-rich), and is attributed to different excitation and reaction mechanisms of CH4 and N2.

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