Surface Treatment by Ar Plasma Irradiation in Electron Cyclotron Resonance Chemical Vapor Deposition
2000 ◽
Vol 39
(Part 1, No. 5A)
◽
pp. 2761-2766
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2002 ◽
Vol 235
(1-4)
◽
pp. 333-339
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1996 ◽
Vol 14
(3)
◽
pp. 1687
◽
1995 ◽
Vol 05
(C5)
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pp. C5-671-C5-677
1998 ◽
Vol 16
(3)
◽
pp. 1912-1916
◽
1997 ◽
Vol 292
(1-2)
◽
pp. 124-129
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