Photoresist Ashing Process Using Carbon Tetrafluoride Gas Plasma with Ammonia Gas Addition

2001 ◽  
Vol 40 (Part 1, No. 7) ◽  
pp. 4475-4478
Author(s):  
Makoto Saito ◽  
Hideo Eto ◽  
Kayoko Omiya ◽  
Tetsuya Homma ◽  
Takao Nagatomo
2014 ◽  
Vol 1 (4) ◽  
pp. 16-19
Author(s):  
Vivek Talwar ◽  
◽  
Ravi Chand Singh ◽  

Alloy Digest ◽  
1957 ◽  
Vol 6 (9) ◽  

Abstract NITRALLOY 125 (0.20-0.30% C) is a special alloy steel which can be nitrided, that is, surface hardened, without final quenching, by the action of ammonia gas at relatively low temperatures. Nitralloy 125 is also known as Nitralloy H. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties as well as fracture toughness. It also includes information on corrosion resistance as well as forming, heat treating, machining, and joining. Filing Code: SA-61. Producer or source: Alloy steel mills and foundries.


Alloy Digest ◽  
1956 ◽  
Vol 5 (3) ◽  

Abstract NITRALLOY N is a special alloy steel which can be nitrided, that is, surface hardened, without final quenching, by the action of ammonia gas at relatively low temperatures. The presence of an appreciable amount of nickel in Nitralloy N both strengthens and toughens the case and develops dispersion hardening in rhe core during nitriding. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties as well as fracture toughness. It also includes information on corrosion resistance as well as forming, heat treating, machining, and joining. Filing Code: SA-39. Producer or source: Alloy steel mills and foundries.


Author(s):  
Priya Gupta ◽  
Savita Maurya ◽  
Narendra Kumar Pandey ◽  
Vernica Verma

: This review paper encompasses a study of metal-oxide and their composite based gas sensors used for the detection of ammonia (NH3) gas. Metal-oxide has come into view as an encouraging choice in the gas sensor industry. This review paper focuses on the ammonia sensing principle of the metal oxides. It also includes various approaches adopted for increasing the gas sensitivity of metal-oxide sensors. Increasing the sensitivity of the ammonia gas sensor includes size effects and doping by metal or other metal oxides which will change the microstructure and morphology of the metal oxides. Different parameters that affect the performances like sensitivity, stability, and selectivity of gas sensors are discussed in this paper. Performances of the most operated metal oxides with strengths and limitations in ammonia gas sensing application are reviewed. The challenges for the development of high sensitive and selective ammonia gas sensor are also discussed.


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