Two-step Process for the Metalorganic Chemical Vapor Deposition Growth of High Quality AlN Films on Sapphire
2003 ◽
Vol 42
(Part 1, No. 4A)
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pp. 1590-1591
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1998 ◽
Vol 192
(1-2)
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pp. 79-83
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2011 ◽
Vol 32
(9)
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pp. 896-901
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1999 ◽
Vol 38
(Part 2, No. 7A)
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pp. L703-L705
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1994 ◽
Vol 35
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pp. 53-60
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