Fabrication and Characteristics of Amorphous Carbon Films Grown in Pure Methane Plasma by using Radio Frequency Plasma Enhanced Chemical Vapor Deposition

2003 ◽  
Vol 42 (Part 1, No. 4A) ◽  
pp. 1744-1748 ◽  
Author(s):  
Kyung-Jea Cho ◽  
Jeong-Tak Ryu ◽  
Yang-Gyu Baek ◽  
Takashi Ikuno ◽  
Shin-ichi Honda ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Radio Frequency ◽  
Amorphous Carbon ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Radio Frequency Plasma ◽  
Amorphous Carbon Films ◽  
Frequency Plasma ◽  
Pure Methane

Synthesis of carbon nanosheets by inductively coupled radio-frequency plasma enhanced chemical vapor deposition

Carbon ◽  
2004 ◽  
Vol 42 (14) ◽  
pp. 2867-2872 ◽  
Author(s):  
Jianjun Wang ◽  
Mingyao Zhu ◽  
Ron A. Outlaw ◽  
Xin Zhao ◽  
Dennis M. Manos ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Radio Frequency ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Radio Frequency Plasma ◽  
Carbon Nanosheets ◽  
Inductively Coupled ◽  
Frequency Plasma
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