Atomic Force Microscope Cantilever Array for Parallel Lithography of Quantum Devices
2004 ◽
Vol 43
(6B)
◽
pp. 4041-4044
◽
2007 ◽
Vol 78
(8)
◽
pp. 086101
◽
2011 ◽
Vol 11
(11)
◽
pp. 2664-2670
◽
2009 ◽
Vol 20
(12)
◽
pp. 125501
◽