Very High Selective Etching of GaAs/Al0.2Ga0.8As for Gate Recess Process to Pseudomorphic High Electron Mobility Transistors (PHEMT) Applications Using Citric Buffer Solution
2004 ◽
Vol 43
(No. 6B)
◽
pp. L800-L802
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2007 ◽
Vol 46
(2)
◽
pp. 478-484
◽
2008 ◽
Vol 155
(12)
◽
pp. H987
◽
2001 ◽
Vol 45
(9)
◽
pp. 1645-1652
◽
2009 ◽
Vol 156
(5)
◽
pp. H367
◽