ScienceGate
Advanced Search
Author Search
Journal Finder
Blog
Sign in / Sign up
ScienceGate
Search
Author Search
Journal Finder
Blog
Sign in / Sign up
(Invited) Atomic Layer Deposition of HfO2 Using HF Etched Thermal and RTP SiO2 as Interfacial Layers
ECS Transactions
◽
10.1149/06102.0143ecst
◽
2014
◽
Vol 61
(2)
◽
pp. 143-149
◽
Cited By ~ 1
Author(s):
L. Han
◽
Z. D. Chen
Keyword(s):
Atomic Layer Deposition
◽
Atomic Layer
◽
Interfacial Layers
◽
Layer Deposition
Download Full-text
Related Documents
Cited By
References
(Invited) Atomic Layer Deposition of HfO2 Using HF Etched Thermal and RTP SiO2 as Interfacial Layers
ECS Meeting Abstracts
◽
10.1149/ma2014-01/36/1364
◽
2014
◽
Keyword(s):
Atomic Layer Deposition
◽
Atomic Layer
◽
Interfacial Layers
◽
Layer Deposition
Download Full-text
Impact of Atomic Layer Deposition High k Films on Slow Trap Density in Ge MOS Interfaces With GeOx Interfacial Layers Formed by Plasma Pre-Oxidation
IEEE Journal of the Electron Devices Society
◽
10.1109/jeds.2018.2822758
◽
2018
◽
Vol 6
◽
pp. 950-955
◽
Cited By ~ 4
Author(s):
Mengnan Ke
◽
Mitsuru Takenaka
◽
Shinichi Takagi
Keyword(s):
Atomic Layer Deposition
◽
Atomic Layer
◽
Trap Density
◽
Interfacial Layers
◽
Layer Deposition
◽
High K
Download Full-text
Influence of HfO2 and SiO2 interfacial layers on the characteristics of n-GaN/HfSiOx capacitors using plasma-enhanced atomic layer deposition
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/6.0001334
◽
2021
◽
Vol 39
(6)
◽
pp. 062405
Author(s):
Toshihide Nabatame
◽
Erika Maeda
◽
Mari Inoue
◽
Masafumi Hirose
◽
Yoshihiro Irokawa
◽
...
Keyword(s):
Atomic Layer Deposition
◽
Atomic Layer
◽
Interfacial Layers
◽
Layer Deposition
Download Full-text
Tuning the Absolute Band Gap of Silicon Photonic Crystals by Atomic Layer Deposition (ALD) Interfacial Layers
ECS Transactions
◽
10.1149/1.2779089
◽
2019
◽
Vol 11
(7)
◽
pp. 259-267
Author(s):
Makhin Thitsa
◽
Diefeng Gu
◽
Helmut Baumgart
◽
Sacharia Albin
Keyword(s):
Photonic Crystals
◽
Atomic Layer Deposition
◽
Band Gap
◽
Atomic Layer
◽
Interfacial Layers
◽
Layer Deposition
◽
Silicon Photonic
◽
The Absolute
Download Full-text
Tuning the Absolute Band Gap of Silicon Photonic Crystals by Atomic Layer Deposition (ALD) Interfacial Layers
ECS Meeting Abstracts
◽
10.1149/ma2007-02/17/1003
◽
2007
◽
Keyword(s):
Photonic Crystals
◽
Atomic Layer Deposition
◽
Band Gap
◽
Atomic Layer
◽
Interfacial Layers
◽
Layer Deposition
◽
Silicon Photonic
◽
The Absolute
Download Full-text
Impact of La2O3 interfacial layers on InGaAs metal-oxide-semiconductor interface properties in Al2O3/La2O3/InGaAs gate stacks deposited by atomic-layer-deposition
Journal of Applied Physics
◽
10.1063/1.4929650
◽
2015
◽
Vol 118
(8)
◽
pp. 085309
◽
Cited By ~ 17
Author(s):
C.-Y. Chang
◽
O. Ichikawa
◽
T. Osada
◽
M. Hata
◽
H. Yamada
◽
...
Keyword(s):
Atomic Layer Deposition
◽
Metal Oxide
◽
Atomic Layer
◽
Metal Oxide Semiconductor
◽
Oxide Semiconductor
◽
Interface Properties
◽
Gate Stacks
◽
Semiconductor Interface
◽
Interfacial Layers
◽
Layer Deposition
Download Full-text
Reduction of Charge Trapping in $\hbox{HfO}_{2}$ Film on Ge Substrates by Atomic Layer Deposition of Various Passivating Interfacial Layers
IEEE Transactions on Electron Devices
◽
10.1109/ted.2012.2204996
◽
2012
◽
Vol 59
(9)
◽
pp. 2350-2356
◽
Cited By ~ 7
Author(s):
Hyung-Suk Jung
◽
Il-Hyuk Yu
◽
Hyo Kyeom Kim
◽
Sang Young Lee
◽
Joohwi Lee
◽
...
Keyword(s):
Atomic Layer Deposition
◽
Charge Trapping
◽
Atomic Layer
◽
Interfacial Layers
◽
Layer Deposition
Download Full-text
Atomic layer deposition of insulating nitride interfacial layers for germanium metal oxide semiconductor field effect transistors with high-κ oxide/tungsten nitride gate stacks
Applied Physics Letters
◽
10.1063/1.2741609
◽
2007
◽
Vol 90
(21)
◽
pp. 212104
◽
Cited By ~ 44
Author(s):
Kyoung H. Kim
◽
Roy G. Gordon
◽
Andrew Ritenour
◽
Dimitri A. Antoniadis
Keyword(s):
Atomic Layer Deposition
◽
Field Effect
◽
Field Effect Transistors
◽
Atomic Layer
◽
Metal Oxide Semiconductor
◽
Oxide Semiconductor
◽
Tungsten Nitride
◽
Gate Stacks
◽
Interfacial Layers
◽
Layer Deposition
Download Full-text
Application of Atomic Layer Deposition in Dye-Sensitized Photoelectrosynthesis Cells
Trends in Chemistry
◽
10.1016/j.trechm.2020.11.002
◽
2021
◽
Vol 3
(1)
◽
pp. 59-71
Author(s):
Degao Wang
◽
Qing Huang
◽
Weiqun Shi
◽
Wei You
◽
Thomas J. Meyer
Keyword(s):
Atomic Layer Deposition
◽
Atomic Layer
◽
Dye Sensitized
◽
Layer Deposition
Download Full-text
Growth and Characteristics of ZnO Nanotube Arrays on Si Substrate by Atomic Layer Deposition in Anodic Aluminum Oxide
10.1557/proc-1109-b09-09
◽
2008
◽
Author(s):
Soo Jin Chua
◽
Miao Wang
◽
Han Gao
◽
Carl V. Thompson
◽
Lee Kheng Tan
Keyword(s):
Atomic Layer Deposition
◽
Aluminum Oxide
◽
Anodic Aluminum Oxide
◽
Atomic Layer
◽
Nanotube Arrays
◽
Si Substrate
◽
Anodic Aluminum
◽
Zno Nanotube
◽
Layer Deposition
Download Full-text
Sign in / Sign up
Close
Export Citation Format
Close
Share Document
Close