A Study on Low Dielectric Material Deposition Using a Helicon Plasma Source
1996 ◽
Vol 143
(9)
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pp. 2990-2995
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Keyword(s):
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2018 ◽
Vol 6
(9)
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pp. 2370-2378
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2001 ◽
Vol 72
(12)
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pp. 4377-4382
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2018 ◽
Vol 89
(10)
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pp. 103504
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Keyword(s):
2010 ◽
Vol 81
(7)
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pp. 075106
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2019 ◽
Vol 61
(6)
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pp. 065003
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Keyword(s):
2019 ◽
Vol 75
(7)
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pp. 683-689
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Keyword(s):