Formation of Pedestal Oxynitride Layer by Extremely Shallow Nitrogen Implantation in Planar R.F. Plasma Reactor
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2003 ◽
Vol 7
(1)
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pp. 43-49
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High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2003 ◽
Vol 7
(3)
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pp. 373-382
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2009 ◽
Vol 13
(2)
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pp. 165-177
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2007 ◽
Vol 11
(4)
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pp. 505-513
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High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2010 ◽
Vol 14
(1-2)
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pp. 119-127
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High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2017 ◽
Vol 21
(4)
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pp. 359-375
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