Resistive Switching in Zinc-Tin-Oxide and Atomic Layer Deposition of Nanolaminates for Amorphous Oxide Semiconductor Thin Film Transistors

2012 ◽  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Oxide Semiconductor ◽  
Amorphous Oxide Semiconductor ◽  
Layer Deposition ◽  
Zinc Tin Oxide ◽  
Semiconductor Thin Film

High-Performance Thin-Film Transistors of Quaternary Indium–Zinc–Tin Oxide Films Grown by Atomic Layer Deposition

2019 ◽  
Vol 11 (16) ◽  
pp. 14892-14901 ◽  
Author(s):  
In-Hwan Baek ◽  
Jung Joon Pyeon ◽  
Seong Ho Han ◽  
Ga-Yeon Lee ◽  
Byung Joon Choi ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Thin Film Transistors ◽  
High Performance ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Zinc Tin Oxide ◽  
Tin Oxide Films

Thin film characterization of zinc tin oxide deposited by thermal atomic layer deposition

2014 ◽  
Vol 556 ◽  
pp. 186-194 ◽  
Author(s):  
Marja N. Mullings ◽  
Carl Hägglund ◽  
Jukka T. Tanskanen ◽  
Yesheng Yee ◽  
Scott Geyer ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Thin Film Characterization ◽  
Zinc Tin Oxide

Physical/chemical properties of tin oxide thin film transistors prepared using plasma-enhanced atomic layer deposition

2012 ◽  
Vol 47 (10) ◽  
pp. 3052-3055 ◽  
Author(s):  
Byung Kook Lee ◽  
Eunae Jung ◽  
Seok Hwan Kim ◽  
Dae Chul Moon ◽  
Sun Sook Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Thin Film Transistors ◽  
Chemical Properties ◽  
Atomic Layer ◽  
Oxide Thin Film ◽  
Physical Chemical ◽  
Layer Deposition
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